University of Southern California Dissertations and Theses

Fabrication of ultrasound transducer and 3D-prinitng ultrasonic device

(USC Thesis Other)

Fabrication of ultrasound transducer and 3D-prinitng ultrasonic device

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Content F A B R I C A T I O N O F U L T R A S O U N D T R A N S D U C E R A N D 3 D - P R I N T I N G
U L T R A S O N I C D E V I C E
by
Y us hun Z e ng
A T he s i s P r e s e nt e d t o t he
F A C U L T Y O F T H E U S C V I T E R B I S C H O O L O F E N G I N E E R I N G
U N I V E R S I T Y O F S O U T H E R N C A L I F O R N I A
I n P a r t i a l F ul f i l l m e nt of t he
R e qui r e m e nt s f or t he D e gr e e
M A S T E R O F S C I E N C E
( B I O M E D I C A L E N G I N E E R I N G )
M a y 2021
C opy r i ght 2021 Y us hun Z e ng
i i
A c k n o w l e d g e m e n t s
D ur i ng m y m a s t e r s t udy i n U S C , I w i s h t o s how g r e a t r e s pe c t a nd g r a t e f ul ne s s t o D r . Q i f a Z hou.
E s pe c i a l l y , I w a nt t o s i nc e r e l y t ha nk D r . Z hou f or g i vi ng m e l ot s of oppor t uni t i e s i n r e s e a r c h
dur i ng m y m a s t e r c a r e e r . A nd I w oul d l i ke t o e x pr e s s m y g r a t i t ude t o t he m e m be r s of m y m a s t e r
t he s i s c om m i t t e e , D r . S t a nl e y Y a m a s hi r o a nd D r . Y ong C he n f or t he i r g r e a t a s s i s t a nc e . B e s i de s , I
w a nt t o t ha nk D r . L a i m i ng J i a ng f or t e a c hi ng m e how t o f a br i c a t e ul t r a s ound t r a ns duc e r .
M or e ove r , I a m g r a t e f ul t o Y i z he S un, R unz e L i , G e ngx i L u , X ue j un Q i a n, J unha ng Z ha ng,
H a oc he n K a ng, Y i Q ua n f or t he i r he l p dur i ng t he e x pe r i m e nt s . F i na l l y , I w a nt t o t ha nk m y
pa r e nt s a nd g i r l f r i e nd f or s uppor t i ng m e .
i i i
T A B L E O F C O N T E N T S
A c know l e dge m e nt s ......................................................................................................................... i i
L i s t of T a bl e s .................................................................................................................................. i v
L i s t of F i gur e s .................................................................................................................................. v
A bs t r a c t .......................................................................................................................................... vi i
C ha pt e r 1 I n t r oduc t i on ..................................................................................................................... 1
1.1 U l t r a s ound T r a ns duc e r ....................................................................................................... 1
1.2 3D - P r i nt i ng T e c hnol ogy ..................................................................................................... 2
1.3 S t a t e m e nt of pur pos e .......................................................................................................... 4
C ha pt e r 2. F a br i c a t i on M e t hod ........................................................................................................ 5
2.1 F a br i c a t i on of T r a ns duc e r .................................................................................................. 5
2.2 F a br i c a t i on of 3D - pr i nt i ng ul t r a s oni c de vi c e ..................................................................... 8
2.2.1 P r e pa r a t i on of 3D - P r i nt i ng S a m pl e .......................................................................... 8
2.2.2 I nt e gr a t i on of ul t r a s oni c de vi c e ................................................................................ 9
C ha pt e r 3. C ha r a c t e r i z a t i on ........................................................................................................... 10
3.1 U l t r a s ound t r a ns duc e r pe r f or m a nc e s ................................................................................ 10
3.2 A ppl i c a t i on of 3D - P r i nt i ng ............................................................................................... 15
3.2.1 C ha r a c t e r i z a t i on of 3D - pr i nt e d s a m pl e .................................................................. 15
3.2.2 U l t r a s ound s e ns i ng of 3D - pr i ng de vi c e ................................................................. 18
C ha pt e r 4. C onc l us i ons .................................................................................................................. 22
4.1 E f f e c t of ul t r a s ound t r a ns duc e r f a br i c a t i on ...................................................................... 22
4.2 E f f e c t of 3D - pr i nt i ng m e t hod f or ul t r a s oni c de vi c e ......................................................... 22
R e f e r e nc e s : .................................................................................................................................... 22
i v
L i s t o f T a b l e s
T a bl e 1. T he pi e z oe l e c t r i c a nd a c ous t i c pa r a m e t e r s of s e ve r a l t y p i c a l pi e z oe l e c t r i c m a t e r i a l s ....... 7
T a bl e 2. S i m ul a t e d P a r a m e t e r s of K N N T r a ns duc e r ....................................................................... 7
T a bl e 3. D e ns i t y of s e ve r a l B T O ................................................................................................... 17
T a bl e 4. P e r f or m a nc e pa r a m e t e r s of t he ul t r a s oni c de vi c e . ........................................................... 21
v
L i s t o f F i g u r e s
F i g . 1 ( a ) I n n e r s t r u c t u r e o f t h e u l t r a s o u n d t r a n s d u c e r , ( b ) D i c e d p i e z o - e l e m e n t u n d e r m i c r o s c o p e , ( c )
O p t i c a l i m a g e o f f a b r i c a t e d n e e d l e t r a n s d u c e r , ( d ) S p u t t e r e d p i e z o - e l e m e n t i n t r a n s d u c e r . . . . . . . . . . . . . . . . . . . . . . . . . . 8
F i g . 2 ( a ) S c h e m a t i c a n d d e s i g n o f M a s k - i m a g e - p r o j e c t i o n - b a s e d S t e r e o l i t h o g r a p h y ( M I P - S L ) s y s t e m . ( b )
S l i c e d 2 D i m a g e o f a 3 D m o d e l p r o j e c t e d b y L E D p r o j e c t o r . ( c ) c o m p u t e r - a i d e d d e s i g n e d h o n e y c o m b -
s t r u c t u r e m o d e l . ( d ) I n t e r f a c e o f t h e M I P - S L s y s t e m d e v e l o p e d i n h o u s e . ( e ) O p t i c a l i m a g i n g o f t h e g r e e n
p a r t . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 0
F i g . 3 ( a ) S i m u l a t e d i m p e d a n c e a n d p h a s e s p e c t r u m , ( b ) s i m u l a t e d p u l s e - e c h o w a v e f o r m a n d s p e c t r u m , ( c )
m e a s u r e d i m p e d a n c e a n d p h a s e s p e c t r u m , ( d ) m e a s u r e d p u l s e - e c h o w a v e f o r m a n d s p e c t r u m , ( e ) .
S c h e m a t i c a n d d e s i g n o f t h e p u l s e - e c h o s y s t e m d e v e l o p e d i n - h o u s e . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 2
F i g . 4 ( a ) T w o - w a y i n s e r t i o n l o s s o f t h e f a b r i c a t e d t r a n s d u c e r , ( b ) S c h e m a t i c a n d d e s i g n o f t h e i n s e r t i o n
l o s s m e a s u r e m e n t . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 3
F i g . 5 ( a ) S c h e m a t i c a n d d e s i g n o f a U B M s y s t e m ( b ) A r r a n g e m e n t o f t u n g s t e n w i r e p h a n t o m ( c ) U B M
i a m g i n g o f t u n g s t e n w i r e p h a n t o m a c h i e v e d b y f a b r i c a t e d t r a n s d u c e r ( d ) U B M i m a g e s o f t h e a n t e r i o r
p o r t i o n i n a n e x c i s e d p o r c i n e e y e b a l l g a i n d e b y f a b r i c a t e d t r a n s d u c e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 4
F i g . 6 S i m u l a t e d p i e z o e l e c t r i c p o t e n t i a l d i s t r i b u t i o n i n ( a ) h o n e y c o m b s t r u c t u r e a n d ( b ) s o l i d b r i c k
s t r u c t u r e [ 6 2 ] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 6
F i g . 7 ( a ) G r e e n - p a r t w i t h b r i c k s t r u c t u r e . ( b ) G r e e n - p a r t w i t h h o n e y c o m b - s t r u c t u r e ( 1 0 0 % s i z e r a t i o ) . ( c )
G r e e n - p a r t w i t h h o n e y c o m b - s t r u c t u r e ( 8 0 % s i z e r a t i o ) . ( d - f ) O p t i c a l m i c r o s c o p y i m a g e s o f l a y e r d e t a i l s
f o r t h e g r e e n - p a r t s . ( g ) T h e l a y e r d e t a i l s o f t h e s a m p l e b e f o r e s i n t e r i n g p r o c e s s . ( h ) C o m p a r i s o n o f t h e
s a m p l e s b e f o r e a n d a f t e r s i n t e r i n g . ( i ) T h e l a y e r d e t a i l s o f t h e s i n t e r e d s a m p l e . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 7
F i g . 8 ( a ) T h e s i n t e r e d c o m p o s i t e s a m p l e f i l l e d w i t h e p o x y r e s i n . ( b ) T h e d e t a i l s o f t h e h o n e y c o m b -
s t r u c t u r e u n d e r t h e m i c r o s c o p e w i t h a s c a l e b a r o f 5 0 0 μ m . ( c ) I m p e d a n c e a n d p h a s e a n g l e s p e c t r u m o f
t h e s p u t t e r e d c o m p o s i t e s a m p l e . ( d ) P o l a r i z a t i o n - e l e c t r i c f i e l d h y s t e r e s i s l o o p o f t h e c o m p o s i t e s a m p l e . . 1 9
F i g . 9 ( a ) O p t i c a l i m a g e o f t h e f a b r i c a t e d d e v i c e . ( b ) S c h e m a t i c a n d d e s i g n o f t h e 3 D - p r i n t e d u l t r a s o n i c
v i
d e v i c e . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 0
F i g . 1 0 O u t p u t v o l t a g e a m p l i t u d e s o f t h e d e v i c e o v e r t i m e f o r d i f f e r e n t i n p u t v o l t a g e s o f ( a ) 0 V , ( b ) 2 5 V ,
( c ) 5 0 V , ( d ) 1 0 0 V , ( e ) 1 5 0 V , a n d ( f ) 2 0 0 v . ( g ) T e n d e n c y o f t h e o u t p u t v o l t a g e . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1
v i i
A b s t r a c t
A s a non- i nva s i ve di a gnos t i c m e t hod, hi g h- f r e que nc y ul t r a s oni c i m a g i ng i s w i de l y ut i l i z e d i n
bi om e di c a l i m a g i ng. T he c or e pa r t of t he ul t r a s oni c de vi c e i s pi e z oe l e c t r i c m a t e r i a l . T he m a i n
pi e z oe l e c t r i c m a t e r i a l s a ppl i e d i n f a br i c a t i on of ul t r a s oni c de vi c e s a r e l e a d- ba s e d c e r a m i c s ,
r e pr e s e nt e d by l e a d z i r c ona t e t i t a na t e ( P Z T ) , w hi c h br i ng pot e nt i a l l y t oxi c a nd ha r m f ul pr obl e m
t o hum a n body . T he r e f or e , i t i s vi t a l t o de ve l op ne w e c o- f r i e ndl y l e a d- f r e e m e di c a l de vi c e s a s
l e a d- ba s e d a l t e r na t i ve s . A ddi t i ona l l y , f or c onve nt i ona l f a br i c a t i on m e t hods , t he pi e z oe l e c t r i c
m a t e r i a l s a r e m os t l y pr oduc e d by m ol d- f or m i ng , m i xi ng or di c i ng - f i l i ng m e t hod. N e ve r t he l e s s ,
t he s e t e c hni que s a r e r e s t r i c t e d i n f a br i c a t i ng c om pl e x s ha pe s or s t r uc t ur e s . H e r e i n, i n t hi s w or k,
w e f oc us e d on f a br i c a t i on of l e a d- f r e e ul t r a s ound t r a ns duc e r f or ul t r a s oni c i m a g i ng a ppl i c a t i on
a nd ut i l i z i ng 3D - pr i nt i ng m e t hod t o f a br i c a t e pi e z oe l e c t r i c c om pos i t e s f or ul t r a s oni c de vi c e .
F i r s t l y , f or t he f a br i c a t i on of ul t r a s ound t r a ns duc e r s , a pot a s s i um s odi um ni oba t e ( K N N ) l e a d-
f r e e pi e z oe l e c t r i c m a t e r i a l w a s e m pl oy e d . N e e dl e t r a ns duc e r s w i t h a pe r t ur e s i z e of 0.6 m m × 0.6
m m w e r e de s i gne d, f a br i c a t e d a nd s t udi e d f or i m a g i ng a ppl i c a t i on. T he t r a ns duc e r w i t h a hi g h
c e nt e r f r e que nc y ( 3 3 M H z ) , hi g h pul s e - e c ho s i g na l ( 0.8 V pp) , br oa d ba ndw i dt h ( 89% , - 6 dB ) ,
a nd e x pe c t e d i ns e r t i on l os s ( 20.9 dB ) w a s a c hi e ve d. F ur t he r m or e , a t ung s t e n w i r e - pha nt om a nd a
por c i ne e y e ba l l w e r e us e d f or t e s t i ng t he i m a g i ng pe r f or m a nc e of t he f a br i c a t e d ul t r a s ound
t r a ns duc e r s . S e c ondl y , f or 3D - pr i nt i ng of ul t r a s oni c de vi c e , t he M a s k- I m a ge - P r oj e c t i on- ba s e d
S t e r e ol i t hog r a phy ( M I P - S L ) pr oc e s s , one of 3D - pr i nt i ng m e t hods , w a s a ppl i e d t o f a br i c a t e t he
B a T i O 3- ba s e d pi e z oe l e c t r i c c om pos i t e w i t h hone y c om b s t r uc t ur e . T he 3D - pr i nt e d pi e z oe l e c t r i c
c om pos i t e e x hi bi t e d a de ns e r de ns i t y ( 5.96 g / c m
3
) , pr os pe c t i ve pi e z oe l e c t r i c c ons t a nt ( 60 pC / N )
a nd f e r r oe l e c t r i c pr ope r t i e s . A f t e r be i ng a s s e m bl e d i nt o a n ul t r a s oni c de vi c e , t he 3D - pr i nt e d
pi e z oe l e c t r i c s a m pl e a l s o s how e d a pr om i ne nt out put pow e r f or ul t r a s ound s e ns i ng ( 180 m V pp) .
O ur s t udi e s s ug ge s t t ha t K N N - ba s e d l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l c a n f a br i c a t e ul t r a s ound
v i i i
t r a ns duc e r w i t h a t t r a c t i ve pr ope r t i e s , w hi c h br i ngs m or e pos s i bi l i t i e s i n us i ng l e a d- f r e e
pi e z oe l e c t r i c m a t e r i a l s t o de ve l op hi g h- f r e que nc y a nd s e ns i t i vi t y ul t r a s ound t r a ns duc e r f or
bi om e di c a l i m a g i ng a ppl i c a t i on. W ha t ’ s m or e , t he r e s ul t s a l s o s how e f f e c t i ve ne s s of ut i l i z i ng
3D - pr i nt i ng t e c hnol ogy i n f a br i c a t i ng pi e z oe l e c t r i c c om pos i t e w i t h c om pl e x s t r uc t ur e f or
a s s e m bl i ng ul t r a s oni c de vi c e , i m pl y i ng t ha t 3D - pr i nt i ng m e t hod ha s g r e a t pot e nt i a l i n pr oduc i ng
va r i ous pi e z oe l e c t r i c m a t e r i a l s f or t he f a br i c a t i on of ul t r a s oni c de vi c e s .
1
C h a p t e r 1 I n t r o d u c t i o n
1.1 U l t r as ou n d T r an s d u c e r
U l t r a s ound t r a ns duc e r ha s be e n w i de l y a ppl i e d i n m e di c a l a r e a s , s uc h a s dr ug- de l i ve r y ,
c a r di ol og y a nd a dva nc e d i m a g i ng a ppl i c a t i on, a s i t s e f f i c i e nc y a nd l a c k of i oni z i ng r a di a t i on [ 1-
3] . E s pe c i a l l y a t pr e s e nt , a s one of t he m os t s i g ni f i c a nt m e di c a l di a g nos t i c t ool s , hi g h- f r e que nc y
ul t r a s ound t r a ns duc e r pl a y s a vi t a l r ol e i n g a i ni ng ul t r a s oni c i m a g i ng w i t h r e l a t i ve l y hi g h
r e s ol ut i on a nd qua l i t y [ 4] . S i nc e e y e i s of g r e a t i m por t a nc e f or hum a n body, opht ha l m i c i m a g i ng
ha s a t t r a c t e d l ot s of a t t e nt i ons t o di a gnos e a nd t r e a t va r i ous opht ha l m i c di s e a s e s uc h a s g l a uc om a
or dr y e y e s y n dr om e ( D E S ) [ 5, 6] . A s ul t r a s ound i s a non- i nva s i ve m e t hod, t hus , ul t r a s oni c
i m a g i ng ha s a hug e pot e nt i a l f or a ppl i c a t i on of e y e i m a g i ng. R e c e nt l y , hi g h- f r e que nc y ( 55 M H z )
ul t r a s ound t r a ns duc e r s w e r e de ve l ope d a nd f a br i c a t e d t o a c hi e ve a ul t r a s oni c i m a g i ng of por c i ne
e y e ba l l w i t h hi g h- r e s ol ut i on [ 7] . G e ne r a l l y , t he i nt e r na l s t r uc t ur e of ul t r a s ound t r a ns duc e r s
c ons i s t s of c or e pi e z oe l e c t r i c m a t e r i a l , m a t c hi ng l a y e r a nd E - s ol de r ba c ki ng [ 8] . I n f a br i c a t i on of
ul t r a s ound t r a ns duc e r s , t he c or e pa r t i s s e l e c t i on of pi e z oe l e c t r i c m a t e r i a l . T he pr ope r t i e s of
pi e z oe l e c t r i c m a t e r i a l de t e r m i ne t he t r a ns duc e r pe r f or m a nc e i n s e ns i t i vi t y , e l e c t r i c a l i m pe da nc e
a nd ba ndw i dt h [ 9, 10] . C ur r e nt l y , l e a d- ba s e d pi e z oe l e c t r i c m a t e r i a l s , s uc h a s l e a d z i r c ona t e
t i t a na t e ( P Z T ) a nd l e a d m a g ne s i um ni oba t e - l e a d t i t a na t e ( P M N - P T ) , a r e m a i nl y ut i l i z e d f or
f a br i c a t i on of ul t r a s ound t r a ns duc e r or ot he r ul t r a s oni c de vi c e s f or t he i r out s t a ndi ng pi e z oe l e c t r i c
pr ope r t i e s [ 11- 13] . A s t he l e a d oxi de f r om t he l e a d- ba s e d m a t e r i a l i s ha r m f ul t o hum a ns , t he
f ur t he r de ve l opm e nt of l e a d- ba s e d ul t r a s ound t r a ns duc e r s i s hi nde r e d. H e nc e , de ve l opi ng
ul t r a s oni c de vi c e s w i t h l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l s i s of g r e a t s i g ni f i c a nc e t o r e pl a c e l e a d-
ba s e d one s .
2
I n pa s t de c a de s , num e r ous l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l s ha ve be e n s t udi e d a nd f a br i c a t e d,
r e pr e s e nt i ng by ba r i um t i t a na t e ( B T O ) a nd l i t hi um ni oba t e ( L N O ) , e t a l [ 14- 16] . N e ve r t he l e s s ,
t he i r poor pi e z oe l e c t r i c pr ope r t i e s , s uc h a s l ow c ur i e t e m pe r a t ur e or pi e z oe l e c t r i c c ons t a nt , a r e
a l s o ne e de d t o be i m pr ove d f or f ur t he r i nve s t i g a t i on a nd a ppl i c a t i on. P ot a s s i um s odi um ni oba t e
( K N N ) , a l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l w i t h be t t e r pi e z oe l e c t r i c pr ope r t i e s , ha s t he r e f or e
a t t r a c t e d hug e a t t e nt i ons f or f a br i c a t i on of l e a d- f r e e ul t r a s oni c de vi c e [ 17] . R e c e nt l y , J i a ng e t a l ,
ha s r e por t e d ut i l i z i ng ( K ,N a ) N bO 3 - ba s e d l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l t o f a br i c a t e ul t r a s ound
t r a ns duc e r s i n or de r t o a c hi e ve a hi g h- s e ns i t i vi t y ul t r a s oni c i m a g i ng [ 7, 8] . H e nc e , f a br i c a t i on of
l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l s i s a l s o a t r e nd f or f a br i c a t i on of ul t r a s oni c de vi c e s a nd ot he r
bi om e di c a l a ppl i c a t i ons .
1.2 3D - P r i n t i n g T e c h n ol ogy
T he pi e z oe l e c t r i c m a t e r i a l s c a n be e m pl oy e d w i de s pr e a d i n ul t r a s oni c a ppl i c a t i ons , e s pe c i a l l y , i n
f a br i c a t i on of ul t r a s ound t r a ns duc e r . C om m onl y , pi e z oe l e c t r i c m a t e r i a l s c a n be di vi de d i nt o t hr e e
c a t e gor i e s a s or ga ni c , i nor ga ni c a nd c om pos i t e ( or ga ni c / i nor ga ni c ) m a t e r i a l , s uc h a s L N O ,
pol y ( v i ny l i de ne f l uor i de ) ( P V D F ) a nd P M N - P T / P V D F na noc om pos i t e , e t a l [ 18, 19] . T he
m a nuf a c t ur i ng m e t hods of pi e z oe l e c t r i c m a t e r i a l m a i nl y c ont a i n c a s t i ng a nd di c e - a nd- f i l l
f a br i c a t i on m e t hod, e t c . [ 20, 21] . N e ve r t he l e s s , t he s e t r a di t i ona l f a br i c a t i on m e t hods a r e
e x pe ns i ve l y t e di ous pr oc e s s . B e s i de s , t he y c a nnot m e e t t he r e qui r e m e nt s of m e t i c ul ous m i c r o-
s t r uc t ur e s m a nuf a c t ur i ng. H i g h e f f i c i e nc y , l ow - c os t a nd a bi l i t y of f a br i c a t i ng m a t e r i a l s w i t h
c om pl e x m i c r o - s t r uc t ur e de m ons t r a t e s t he a dva nt a ge s of ut i l i z i ng 3D - pr i nt i ng m e t hod. T hus , 3D -
pr i nt i ng t e c hnol ogy c a n be c ons i de r e d a s a n a ppr opr i a t e m e t hod f or f a br i c a t i on of pi e z oe l e c t r i c
m a t e r i a l s . F or A ddi t i ve m a nuf a c t ur i ng ( 3D - pr i nt i ng) , t he t e c hnol ogy ha s be e n a ppl i e d i n va r i ous
3
f i e l ds , f or i ns t a nc e s , bi om i m e t i c s t r uc t ur e , 4D - pr i nt i ng t e c hnol og y , bi om e di c a l de vi c e s a nd
a r c hi t e c t ur a l m a t e r i a l s [ 22- 26] . 3D - pr i nt i ng t e c hnol og y c a n f a br i c a t e m a t e r i a l s t o g a i n i s ot r opi c
or a ni s ot r opi c pr ope r t i e s f or i de nt i c a l l a y e r s vi a t he c ont r ol l e d f i l l e r a l i g nm e nt [ 27, 28] .
F ur t he r m or e , m a t e r i a l s w i t h va r i ous c om pl e x s t r uc t ur e s a nd s ha pe s c oul d be f a br i c a t e d r e a di l y .
F or e xa m pl e , Y a ng e t a l . de m ons t r a t e d a 3D - pr i nt i ng s y s t e m e na bl e d t o pr oduc e a hi e r a r c hi c a l
s t r uc t ur e [ 29] . O ve r a l l , t o f a br i c a t e m i c r o - s t r uc t ur e s w i t h r e l a t i ve l y hi g h r e s ol ut i on, t he 3D -
pr i nt i ng t e c hnol ogy i s m or e a c c e pt a bl e [ 30] . E s pe c i a l l y , i n s t e nt m a nuf a c t ur i ng, a c a r di ova s c ul a r
s t e nt w i t h r oughl y 85–95% a c c ur a c y i n m m r e s ol ut i on w a s g a i n by us i ng 3D - pr i nt i ng pr oc e s s ,
t hus , i t s how e d a n a l t e r na t i ve f or t he t r a di t i ona l m a nuf a c t ur i ng m e t hod [ 31] . F ur t he r m or e , one
s i ng l e l a y e r t hi c kne s s c a n e ve n a c hi e ve r e s ol ut i on of 100 μ m vi a M I P - S L 3D - pr i nt i ng m e t hod
[ 32] . C ur r e nt l y , i n f a br i c a t i on f or m i ng pr oc e s s , t he 3D - pr i nt i ng m e t hods c oul d be c a t e gor i z e d a s
c he m i c a l a nd phy s i c a l m e t hods . T he f i r s t t y p e of t he pr oc e s s e s t y p i c a l l y ba s e d on c he m i c a l
r e a c t i ons by us i ng opt i c a l or t he r m a l c ur i ng a g e nt s [ 33, 34] . T hi s pr oc e s s e na bl e d t o e nha nc e t he
pi e z oe l e c t r i c c oe f f i c i e nt of t he pr i nt e d s a m pl e [ 35, 36] . T he ot he r t y p e pr e dom i na nt l y de pe nde d
on phy s i c a l pr oc e s s e s , s uc h a s us i ng hi g h- t e m pe r a t ur e s i nt e r i ng pr oc e s s vi a hi g h- e ne r gy l a s e r
[ 37- 39] . M or e ove r , t he ot he r m a i nl y 3D - pr i nt i ng t e c hnol ogi e s us e d i n m a t e r i a l f a br i c a t i on a r e
f us e d de pos i t i on m ode l i ng ( F D M ) , s t e r e ol i t hogr a phy ( S L A ) a nd m a t e r i a l j e t t i ng e t a l [ 40- 43] .
T he r e f or e , a pr ope r s e l e c t i on of 3D - pr i nt i ng m e t hod i s of s i g ni f i c a nc e f or r e s e a r c h i nve s t i g a t i on.
P a r t i c ul a r l y , w i t h hi g h- s pe e d, hi g h- r e s ol ut i on a nd a bi l i t y of pr oduc i ng m a t e r i a l s l a y e r by l a y e r ,
S L A i s a c om m onl y ut i l i z e d 3D - pr i nt i ng t e c hnol og y [ 44, 45] .
3D - pr i nt i ng c a n be a ppl i e d t o pr oduc e l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l s f or i nt e g r a t i ng va r i ous
bi om e di c a l de vi c e s t o r e pl a c e l e a d- ba s e d de vi c e s [ 46- 48] . A s t he f i r s t l e a d- f r e e pe r ovs ki t e
4
pi e z oe l e c t r i c c e r a m i c s , B T O m i xi ng w i t h phot oc ur e d r e s i n ha s a l r e a dy be e n 3D - pr i nt e d f or
m i c r o- s t r uc t ur e s . T he pr i nt e d s a m pl e s how e d c om pa r a t i ve l y out s t a ndi ng di e l e c t r i c a nd
pi e z oe l e c t r i c pe r f or m a nc e s [ 35, 48, 49] . C om pos i t e m a t e r i a l s , s uc h a s 1- 3 or 2- 2 c om pos i t e ,
e na bl e t o opt i m i z e t he m a t e r i a l pr ope r t i e s a nd r e duc e t he a c ous t i c i m pe da nc e [ 8] . H one y c om b-
s t r uc t ur e c a n be c om pos i t e m a t e r i a l by a ddi ng e pox y w i t h l ow - pe r m i t t i vi t y i n t he hol e s t r uc t ur e s .
H e nc e , t he vol t a g e c oe f f i c i e nt ( g 3 3 = d 3 3 / ε ) c a n be i m pr ove d vi a r e duc i ng t he pe r m i t t i vi t y , w hi c h
i nc r e a s e t he a bi l i t y of s e ns i ng ul t r a s ound f or c om pos i t e [ 50] . A ddi t i ona l l y , hone y c om b- s t r uc t ur e
c a n a l s o e nha nc e t he s t r uc t ur a l , m e c ha ni c a l a nd e l e c t r i c pr ope r t i e s , w hi c h s how s vi t a l pot e nt i a l
f or f a br i c a t i on of ul t r a s oni c de vi c e s w i t h l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l [ 51- 53] .
1.3 S t at e m e n t of p u r p os e
T o de ve l op ne w e c o- f r i e ndl y l e a d- f r e e m e di c a l de vi c e s a s l e a d- ba s e d a l t e r na t i ve s a nd opt i m i z e
f a br i c a t i on pr oc e s s , i n t hi s pa pe r , a K N N - ba s e d l e a d- f r e e ul t r a s ound t r a ns duc e r w a s de s i gne d a nd
f a br i c a t e d f or bi om e di c a l i m a g i ng a ppl i c a t i on a nd a l e a d- f r e e m a t e r i a l , B T O , w i t h hone y c o m b-
s t r uc t ur e w a s f a br i c a t e d by M a s k- I m a ge - P r oj e c t i on- ba s e d S t e r e ol i t hog r a phy ( M I P - S L ) m e t hod
f or i nt e g r a t i ng t he ul t r a s oni c de vi c e . F or r e s ul t s of ul t r a s ound t r a ns duc e r f a br i c a t i on, a hi g h-
f r e que nc y ne e dl e t r a ns duc e r w i t h a pe r t ur e s i z e of 0.6 m m × 0.6 m m , c e nt r a l f r e que nc y ( 33 M H z )
a nd a br oa d - 6dB ba ndw i dt h ( 89% ) w a s a c hi e ve d f or a ppl i c a t i on of bi om e di c a l i m a g i ng.
M or e ove r , a n ul t r a s oni c i m a g i ng of por c i ne e y e w a s a l s o obt a i ne d, w hi c h s how s t ha t ut i l i z i ng
K N N l e a d- f r e e m a t e r i a l s a s a n a l t e r na t i ve f or f a br i c a t i on of ul t r a s ound t r a ns duc e r c a n ha ve a
g r e a t pot e nt i a l i n a ppl i c a t i on of bi om e di c a l i m a g i ng. I n 3D - pr i nt i ng pa r t , pi e z oe l e c t r i c pr ope r t i e s
of t he 3D - pr i nt e d B T O s a m pl e w e r e s t udi e d f or i nve s t i g a t i ng t he e f f e c t i ve ne s s of t he 3D - pr i nt i ng
m e t hod. B e s i de s , a n ul t r a s oni c de vi c e w a s i nt e g r a t e d by 3D - pr i nt e d s a m pl e t o e x pl or e t he
5
pr i nt e d- m a t e r i a l pe r f or m a nc e of ul t r a s ound s e ns i ng . R e l e va nt r e s ul t de m ons t r a t e d t ha t t he 3D -
pr i nt e d pi e z oe l e c t r i c m a t e r i a l obt a i ne d s uf f i c i e nt f e r r oe l e c t r i c a nd pi e z oe l e c t r i c pr ope r t i e s . T hus ,
i t i m pl i e d t ha t t he 3D - pr i nt i ng m e t hod c a n be a ppl i e d i n f a br i c a t i ng va r i ous bi om e di c a l de vi c e s
w i t h c om pl e x s t r uc t ur e a nd e x c e l l e nt pe r f or m a nc e s .
H e r e i n, f a br i c a t i on of l e a d- f r e e ul t r a s ound t r a ns duc e r a nd 3D - pr i nt i ng ul t r a s oni c de vi c e w i l l
pr ovi de r e s e a r c he r s w i t h m or e t ool s t o i nve s t i g a t e a nd s t udy t he pi e z oe l e c t r i c m a t e r i a l s i n
bi om e di c a l a ppl i c a t i ons .
C h a p t e r 2 . F a b r i c a t i o n M e t h o d
2.1 F ab r i c at i on of T r an s d u c e r
T he l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l , K N N , w a s g a i ne d by t r a di t i ona l s ol i d- s t a t e r e a c t i on pr oc e s s .
T he pi e z oe l e c t r i c a nd a c ous t i c pa r a m e t e r s of t he K N N a nd ot he r t y p i c a l m a t e r i a l s a r e s how n i n
T a bl e 1. T he e l e c t r om e c ha ni c a l c oupl i ng c oe f f i c i e nt a nd a c ous t i c ve l oc i t y a r e c om pa t i bl e t o P Z T
5H , w hi c h i ns pi r e s t he us i ng of l e a d- f r e e m a t e r i a l s a s a n a l t e r na t i ve . B a s e d on pr e vi ous s t udi e s , a
33 M H z K N N - ba s e d ne e dl e t r a ns duc e r w i t h m i c r o- s c a l e s i z e of 0.6 m m × 0.6 m m w a s
de t e r m i ne d [ 7, 54, 55] . A K r i m bol t z , L e e dom , a nd M a t t a e i ( K L M ) t r a ns duc e r e qui va l e nt c i r c ui t
m ode l , P i e z oC A D ( S oni c C onc e pt s I n c ., B ot he l l , U S A ) , w a s a ppl i e d f or s i m ul a t i ng a nd
opt i m i z i ng t he de s i gn of t he t r a ns duc e r [ 7, 8] . T he i nne r s t r uc t ur e of t he ne e dl e ul t r a s ound
t r a ns duc e r i s pr e s e nt e d i n F i g . 1a . T w o qua r t e r w a ve l e ngt h m a t c hi ng l a y e r s w a s ut i l i z e d a s
c om pe ns a t i on f or di s s - m a t c h of a c ous t i c i m pe da nc e be t w e e n K N N ( Z p = 27 M R a y l ) a nd hum a n
body t i s s ue ( Z l = 1.5 M R a y l ) i n or de r t o a c hi e ve ul t r a s ound t r a ns duc e r w i t h hi g h- s e ns i t i vi t y [ 56] .
6
T he i de a l a c ous t i c i m pe da nc e f or f i r s t ( Z m 1 ) a nd s e c ond ( Z m 2 ) m a t c hi ng l a y e r c a n be c a l c ul a t e d a s
7.8 M R a y l a nd 2.3 M R a y l , s e pa r a t e l y , a c c or di ng t o e qua t i ons be l ow [ 7, 8, 57, 58] :
7 / 1 3
1
4
p
1 m ) Z Z ( Z = ( 1)
7 / 1 6
1
p 2 m ) Z Z ( Z =
( 2)
F i r s t a nd s e c ond m a t c hi ng l a y e r w a s s i m ul a t e d de pe ndi ng on Z m 1 a nd Z m 2 . S i l ve r ( 2- 3.5 μ m ,
S i g m a - A l dr i c h, U S A ) , I n s ul c a s t 501 a nd I n s ul c ur e 9 ( A m e r i c a n S a f e t y T e c hnol ogi e s , U S A ) w e r e
m i xe d ( 3: 1.1062 : 0.1438) a s s m oot h s l ur r y of s i l ve r e pox y t o f or m t he f i r s t m a t c hi ng l a y e r [ 7] .
F ur t he r m or e , pa r y l e ne C ( S pe c i a l t y C oa t i ng S y s t e m s , U S A ) w a s a ppl i e d a s s e c ond m a t c hi ng
l a y e r . F or e l e c t r i c a l i nt e r c onne c t i on, c onduc t i ve s i l ve r pa s t e ( 5.89 M R a y l ) ( E - S ol de r 3022,
V onR ol l I s ol a , U S A ) w a s e m pl oy e d a s t he ba c ki ng m a t e r i a l [ 8] . F or m a nuf a c t ur i ng, t he
t hi c kne s s of t he K N N m a t e r i a l w a s c a l c ul a t e d a nd l a ppe d t o 80 μ m , by t he f ol l ow i ng e qua t i on [ 7,
8] :
f
C p
t
2
= ( 3)
T he s i m ul a t e d pa r a m e t e r s of t he t r a ns duc e r w e r e l i s t e d i n T a bl e 2 a s be l ow . F or f a br i c a t i on, t he
K N N m a t e r i a l w a s f i r s t l y l a ppe d t o de s i gne d t hi c kne s s ( 80 μ m ) a nd pol i s he d. T he n, A u/ C r
e l e c t r ode w a s s put t e r e d on bot h s i de s of t he pi e z om a t e r i a l by S put t e r C oa t e r ( N S C - 3000,
N a noM a s t e r , U S A ) . T he f i r s t m a t c hi ng l a y e r w a s a dde d on t he t op of t he K N N m a t e r i a l , a f t e r
c ur i ng a t 40 ℃ f or 4h, t he f i r s t m a t c hi ng l a y e r w a s a l s o l a ppe d t o de s i g ne d t hi c kne s s ( 10 μ m ) .
W ha t ’ s m or e , t he E - s ol de r ba c ki ng m a t e r i a l w a s a l s o f i l l e d on t he ba c k s i de of t he K N N m a t e r i a l
f or c ur i ng a t 45 ℃ f or 2h. A f t e r w a r ds , ba s e d on t he s i z e of t he bl ood ve s s e l , t he ba c ki ng m a t e r i a l
w a s g r ound t o t hi c kne s s of 500 μ m . I n F i g . 1b, t he w hol e pi e z om a t e r i a l s w i t h m a t c hi ng l a y e r a nd
ba c ki ng m a t e r i a l w a s di c e d a s s m a l l e l e m e nt w i t h a pe r t ur e s i z e of 0.6 m m × 0.6 m m vi a a di c i ng
7
s a w ( T c a r 864- 1, T he r m oc a r bon, U S A ) . A m e t a l hous i ng w a s c ut by l a t he f or hol di ng t he ne e dl e .
T he s m a l l pi e c e of pi e z o- e l e c m e nt w a s a s s e m bl e d i nt o t he pol y i m i de t ube , a nd t he e pox y w a s
f i l l e d i n t he g a ps be t w e e n pi e z o- e l e m e nt a nd t ube f or e l e c t r i c a l i s ol a t i on. H e r e a f t e r , w hol e
pol y i m i de t ube w i t h pi e z o- e l e m e nt w a s i nt e g r a t e d i nt o a s t a i n- l e s s ne e dl e . F i na l l y , t he ne e dl e
w a s a s s e m b l e d w i t h m e t a l hous i ng a nd c onne c t e d w i t h a S ubM i ni a t ur e V e r s i on A ( S M A )
c onne c t or by a t hi n c oppe r w i r e . T he opt i c a l i m a g e of t he ne e dl e t r a ns duc e r w a s de m ons t r a t e d i n
F i g . 1c . F or f i na l g r ound c onne c t i on, t he A u/ C r e l e c t r ode ( F i g . 1d) w a s s put t e r e d on t he f i r s t
m a t c hi ng l a y e r , s t a i nl e s s ne e dl e t ube a nd m e t a l hous i ng . F i na l l y , t he pa r y l e ne C w i t h t hi c kne s s
of 10 μ m w a s c oa t e d a s s e c ond m a t c hi ng l a y e r by pa r y l e ne c oa t e r .
T a b l e 1 . T h e p i e z o e l e c t r i c a n d a c o u s t i c p a r a m e t e r s o f s e v e r a l t y p i c a l p i e z o e l e c t r i c m a t e r i a l s
P i e z om a t e r i a l s K N N ( t hi s s t udy ) P M N - P T [ 59] P Z T 5H [ 8]
ρ ( kg/ m
3
) 4399 8060 7500
d 3 3 ( pC / N ) 426 2820 593
Z a ( M R a y l ) 27.3 37.1 30
k t 0.49 0.58 0.51
c p ( m / s ) 6210 4610 4580
T c ( ℃ ) 234.5 130 200
t a n δ ( % ) 3 0.4 2
T a b l e 2 . S i m u l a t e d P a r a m e t e r s o f K N N T r a n s d u c e r
S i m ul a t e d P a r a m e t e r s I n P i e z oC A D K N N - T r a ns duc e r
C e nt r a l F r e que nc y 33 M H z
A pe r t ur e S i z e 0.6 m m × 0.6 m m
T hi c kne s s of P i e z oe l e c t r i c ( K N N ) l a y e r 80 μ m
T hi c kne s s of F i r s t M a t c hi ng L a y e r ( S l i ve r E pox y ) 10 μ m
T hi c kne s s of S e c ond M a t c hi ng L a y e r ( P a r y l e ne ) 15 μ m
T hi c kne s s of B a c ki ng M a t e r i a l ( E - S ol de r 3022) 1 m m
8
F i g . 1 ( a ) I n n e r s t r u c t u r e o f t h e u l t r a s o u n d t r a n s d u c e r , ( b ) D i c e d p i e z o - e l e m e n t u n d e r m i c r o s c o p e , ( c )
O p t i c a l i m a g e o f f a b r i c a t e d n e e d l e t r a n s d u c e r , ( d ) S p u t t e r e d p i e z o - e l e m e n t i n t r a n s d u c e r .
2.2 F ab r i c at i on of 3D - p r i n t i n g u l t r as on i c d e vi c e
2.2.1 P r e p ar at i on of 3D - P r i n t i n g S am p l e
40, 50, 60 a nd 70 w t % ba r i um t i t a na t e pa r t i c l e s ( S i g m a - A l dr i c h C o. U S A ) w e r e c om bi ne d w i t h
60, 50, 40 a nd 30 w t % phot oc ur a bl e r e s i n ( S I 5 00, E nvi s i onT e c I n c . U S A ) t o obt a i n t he
hom og e ne ous m i xe d s l ur r y by ba l l m i l l i ng m e t hod a t 200 r pm f or 25- 30 m i n. T he n, t he
c om bi ne d s l ur r y w a s t r a ns f e r r e d a nd di s pe ns e d on t he pl a t f or m of t he 3D - pr i nt i ng M I P - S L
s y s t e m ( F i g . 2a ) . T he s l ur r y w a s c a s t e d i n 30 μ m on t he pl a t f or m by bl a de i n di s pe ns e r , a nd t he n
c onve y e d t o c ur i ng a r e a . T he a r e a w a s de f i ne d by L E D pr oj e c t or ut i l i z i ng vi s i bl e l i g ht ( 405 nm
9
w a ve l e ngt h) t o i m pl e m e nt phot oc ur i ng pr oc e s s ( F i g . 2b) . T he e x pos ur e t i m e w a s opt i m i z e d a s 37
s f or one s i ng l e l a y e r c ur i ng pr oc e s s . A s i t i s s how n i n F i g . 2c , t hr e e - di m e ns i ona l m ode l de s i gne d
by S ol i dw or ks s of t w a r e w a s s l i c e d i nt o t w o- di m e ns i ona l i m a g e s vi a a n i n- hous e de ve l ope d
c ont r ol s y s t e m ( F i g . 2d) . D upl i c a t i ng t he s i ng l e - l a y e r f a br i c a t i on pr oc e s s , a g r e e n pa r t ( f a br i c a t e d
s a m pl e be f or e de bi ndi ng pr oc e s s ) w i t h hone y c o m b- s t r uc t ur e w a s g a i ne d ( F i g . 2e ) . T he
phot oc ur e d r e s i n f r om g r e e n pa r t s a m pl e w a s r e m ove d by de bi ndi ng pr oc e s s . A f t e r w a r ds , a
s i nt e r i ng pr oc e s s ( 1350 ℃ , 4h) w a s e m pl oy e d a t a nd c onve r t e d t he de bi nde d s a m pl e i nt o a
s i nt e r e d s a m pl e w i t h de ns e r a nd ha r de r s t r uc t ur e be t w e e n e a c h l a y e r [ 60, 61] .
A m i c r os c ope ( S Z 61, O l y m pus , J a pa n) w a s ut i l i z e d t o obs e r ve a nd r e c or d t he va r i ous s a m pl e
dur i ng t he f a br i c a t i on pr oc e s s . T he de ns i t y of t he s a m pl e s w a s m e a s ur e d by A r c hi m e de s m e t hod.
T o g a i n t he c om pos i t e m a t e r i a l , t he e pox y ( E po- T e k 301 A + B , U S A ) w a s f i l l e d i nt o t he hol e s of
t he s i nt e r e d s a m pl e w i t h hone y c om b- s t r uc t ur e . T he s a m pl e w a s l a ppe d t o 800 µ m a f t e r e pox y
w a s c ur e d a t 45 ℃ f or 2h. B ot h s i de s of t he s a m pl e w e r e s put t e r e d w i t h A u/ C r e l e c t r ode s f or
e l e c t r i c c onne c t i on by S put t e r C oa t e r ( N S C - 3000, N a noM a s t e r , U S A ) . T he n, t he s put t e r e d
c om pos i t e s w e r e pol e d unde r 20 kV / c m a t r oom t e m pe r a t ur e f or 30 m i n. T he i m pe da nc e a nd
pha s e a nge l s pe c t r um w e r e m e a s ur e d by a n i m pe da nc e a na l y z e r ( 4294A , A gi l e nt , U S A ) . A nd
pol a r i z a t i on- e l e c t r i c f i e l d ( P - E ) l oop, hy s t e r e s i s l oop, of t he c om pos i t e s w e r e a l s o t e s t e d by a
f e r r oe l e c t r i c m e a s ur i ng s y s t e m ( H y s t e r e s i s V e r s i on 3.1.1, R a di a nt T e c hnol ogi e s , I n c ., U S A ) .
P i e z oe l e c t r i c c oe f f i c i e nt ( d 3 3 ) w a s m e a s ur e d by d33 m e t e r ( Y E 2730A , A P C P r oduc t s , U S A ) .
2.2.2 I n t e gr at i on of u l t r as on i c d e vi c e
A f t e r m a t e r i a l c ha r a c t e r i z a t i on, t o f ur t he r e x pl or e t he ul t r a s oni c pe r f or m a nc e of t he c om pos i t e
1 0
( 3D - pr i nt e d pi e z oe l e c t r i c c om pos i t e ) , a s e l f - de s i gne d ul t r a s oni c de vi c e w a s a s s e m bl e d. B ot h
s i de s of t he c om pos i t e c onne c t e d w i t h c oppe r w i r e a nd f i l l e d w i t h l i qui d r ubbe r ( E c of l e x 00- 30,
U S A ) t o i nt e g r a t e t he de vi c e . T he out put - a m pl i t ude s w e r e t e s t e d vi a t he s e l f - bui l t ul t r a s oni c
s y s t e m w i t h t he ul t r a s ound t r a ns duc e r t o g a i n t he m a t e r i a l pe r f or m a nc e of ul t r a s ound s e ns i ng .
F i g . 2 ( a ) S c h e m a t i c a n d d e s i g n o f M a s k - i m a g e - p r o j e c t i o n - b a s e d S t e r e o l i t h o g r a p h y ( M I P - S L ) s y s t e m . ( b )
S l i c e d 2 D i m a g e o f a 3 D m o d e l p r o j e c t e d b y L E D p r o j e c t o r . ( c ) c o m p u t e r - a i d e d d e s i g n e d h o n e y c o m b -
s t r u c t u r e m o d e l . ( d ) I n t e r f a c e o f t h e M I P - S L s y s t e m d e v e l o p e d i n h o u s e . ( e ) O p t i c a l i m a g i n g o f t h e g r e e n
p a r t .
C h a p t e r 3 . C h a r a c t e r i z a t i o n
3.1 U l t r as ou n d t r an s d u c e r p e r f or m an c e s
T o i nve s t i g a t e t he pe r f or m a nc e of t he ne e dl e t r a ns duc e r , t he i m pe da nc e - pha s e a ngl e s pe c t r um
a nd pul s e - e c ho w a ve f or m of t he f a br i c a t e d t r a ns duc e r a r e de m ons t r a t e d i n F i g. 3a - b. A l l t he
1 1
s i m ul a t e d r e s ul t s w e r e de s i gne d a nd a c hi e ve d by P i e z oC A D . I n F i g. 3c , t he i m pe da nc e - pha s e
a ngl e s pe c t r um of t he f a br i c a t e d t r a ns duc e r w a s c ha r a c t e r i z e d by i m pe da nc e a na l y z e r ( 4294A ,
A gi l e nt , U S A ) , w hi c h s how s t ha t r e s ona nc e f r e que nc y ( f r ) a nd a nt i - r e s ona nc e f r e que nc y ( f a ) w e r e
de t e r m i ne d a s 32.9 M H z a nd 35.8 M H z , s e pa r a t e l y . T he i m pe da nc e w a s de m ons t r a t e d a s 56 Ω t o
64 Ω f r om f r t o f a . B a s e d on f r a nd f a , t he e f f e c t i ve e l e c t r om e c ha ni c a l c oupl i ng c oe f f i c i e nt ( k e f f )
w a s de s c r i be d a s f ol l ow [ 8] :
2
2
- 1 =
a
r
e f f
f
f
k
( 4)
W he r e s i m ul a t e d a nd m e a s ur e d k e f f w a s c a l c ul a t e d a s 0.70 a nd 0.40, r e s pe c t i ve l y , s how i ng t he
c onve r s i on e f f i c i e nc y of be t w e e n m e c ha ni c a l a nd e l e c t r i c e ne r gy . M or e ove r , t he pul s e - e c ho
w a ve f or m ( F i g. 3d) w a s t e s t e d a s 0.8V pp vi a pul s e - e c ho s y s t e m de ve l ope d i n- hous e ( F i g. 3e ) .
T he t e s t e d t r a ns duc e r w a s pl a c e d i n t he D I w a t e r a nd g e ne r a t e d pul s e by pul s e r - a nd- r e c e i ve r
( P a na m e t r i c s 5900P R , O l y m pus N D T I n c , U S A ) a t da m pi ng of 50 ohm s , 1 μ J / pul s e a nd P R F of
200 H z . A qua r t z w a s put i nt o t he D I w a t e r a s r e f l e c t or . T he r e c e i ve d pul s e - e c ho w a s t he n
t r a ns f or m e d a s f r e que nc y s pe c t r um vi a f a s t F our i e r t r a ns f or m ( F F T ) , w hi c h s how e d t he c e nt r a l
f r e que nc y ( f c ) a nd - 6dB f r a c t i ona l ba ndw i dt h ( B W ) a s 33.1M H z a nd 89% , r e s pe c t i ve l y .
1 2
F i g . 3 ( a ) S i m u l a t e d i m p e d a n c e a n d p h a s e s p e c t r u m , ( b ) s i m u l a t e d p u l s e - e c h o w a v e f o r m a n d s p e c t r u m , ( c )
m e a s u r e d i m p e d a n c e a n d p h a s e s p e c t r u m , ( d ) m e a s u r e d p u l s e - e c h o w a v e f o r m a n d s p e c t r u m , ( e ) .
S c h e m a t i c a n d d e s i g n o f t h e p u l s e - e c h o s y s t e m d e v e l o p e d i n - h o u s e .
1 3
I n F i g . 4a , t he t w o- w a y i ns e r t i on l os s ( I L ) i s m e a s ur e d t o e va l ua t e t he s e ns i t i vi t y of t he f a br i c a t e d
t r a ns duc e r . T he i ns e r t i on l os s w a s de s c r i be d a s f ol l ow s [ 8] :
) V / V l o g ( 2 0 I L e m i t o u t p u t = ( 1)
t he l ow e s t i ns e r t i on l os s of t he t r a ns duc e r w a s c a l c ul a t e d a s 20.9 dB a t 31 M H z . T he F i g . 4b
s how s t he s e t - up of t he i ns e r t i on l os s m e a s ur e m e nt . T he t r a ns duc e r t r a ns m i t t e d ul t r a s ound a t
i de a l f oc a l di s t a nc e s a nd c onne c t e d w i t h f unc t i on g e ne r a t or ( A F G 3252 C , T e kt r oni x , B e a ve r t on,
U S A ) t o e m i t a s i n w a ve bur s t of 5 c y c l e a t a m pl i t ude of 5 V ( V e m i t ) . A s qua r t z w a s a r e f l e c t or ,
t he os c i l l os c ope ( L C 534, L e C r oy C or por a t i on, C he s t nut R i dg e , N Y , U S A ) w i t h 1 M Ω c oupl i ng
r e c e i ve d a nd e x hi bi t t he out put vol t a g e ( V o u t p u t ) .
F i g . 4 ( a ) T w o - w a y i n s e r t i o n l o s s o f t h e f a b r i c a t e d t r a n s d u c e r , ( b ) S c h e m a t i c a n d d e s i g n o f t h e i n s e r t i o n
l o s s m e a s u r e m e n t .
A n ul t r a s oni c bi om i c r os c ope ( U B M ) s y s t e m , w hi c h w a s s i m i l a r a s t he s y s t e m de s c r i be d be f or e ,
w a s ut i l i z e d f or c ha r a c t e r i z a t i on of i m a g i ng pe r f or m a nc e of t r a ns duc e r ( F i g . 5a ) . F i r s t l y , a w i r e
pha nt om i m a g i ng w a s m e a s ur e d t o t e s t t he r e s ol ut i on of t he f a br i c a t e d K N N ne e dl e - t r a ns duc e r .
1 4
T he w i r e pha nt o m w a s c on s i s t e d of t hr e e 20- μ m t ungs t e n w i r e s ( C a l i f or ni a F i ne W i r e C o ,. U S A ) .
T he a r r a nge m e nt of t he s e w i r e s w a s s how e d i n F i g . 5b. T he di s t a nc e be t w e e n e a c h w i r e w a s 0.25
m m i n a x i a l di r e c t i on, a nd 1 m m i n l a t e r a l di r e c t i on. A w i r e pha nt om B - m ode i m a g e ( F i g . 5c )
w a s g a i ne d by f a br i c a t e d ne e dl e - t r a ns duc e r . T he f ul l w i dt h a t ha l f m a x i m um l e ngt h i n a x i a l a nd
l a t e r a l di r e c t i on w e r e t e s t e d a s 24 μ m a nd 210 μ m , r e s pe c t i ve l y . M or e ove r , a por c i ne e y e b a l l
( S i e r r a M e di c a l S c i e nc e , I n c ., U S A ) w a s a ppl i e d t o U B M s y s t e m i n or de r t o t e s t t he t r a ns duc e r
pe r f or m a nc e f or ul t r a s oni c i m a g i ng of bi ol og i c a l t i s s ue . I n F i g . 5d, t he ul t r a s oni c i m a g i ng of t he
e y e ba l l w a s di s pl a y e d , a nd t he s t r uc t ur e of t he e y e i nc l udi ng c or ne a a nd l e ns w a s s how n i n
a na t om i c a l pl a ne . T he c or e s t r uc t ur e s of t he e y e ba l l w e r e vi s ua l i z e d by f a br i c a t e d t r a ns duc e r .
F i g . 5 ( a ) S c h e m a t i c a n d d e s i g n o f a U B M s y s t e m ( b ) A r r a n g e m e n t o f t u n g s t e n w i r e p h a n t o m ( c ) U B M
i a m g i n g o f t u n g s t e n w i r e p h a n t o m a c h i e v e d b y f a b r i c a t e d t r a n s d u c e r ( d ) U B M i m a g e s o f t h e a n t e r i o r
p o r t i o n i n a n e x c i s e d p o r c i n e e y e b a l l g a i n e d b y f a b r i c a t e d t r a n s d u c e r .
1 5
3.2 A p p l i c at i on of 3D - P r i n t i n g
3.2.1 C h ar ac t e r i z at i on of 3D - p r i n t e d s am p l e
U l t r a s ound c a n be c onve r t e d i nt o pi e z oe l e c t r i c pot e nt i a l by pi e z oe l e c t r i c m a t e r i a l s . H e nc e ,
s i m ul a t i ons f or t he ul t r a s ound- i nduc e d pi e z oe l e c t r i c pot e nt i a l w e r e pe r f or m e d vi a f i ni t e e l e m e nt
a na l y s i s s of t w a r e ( C om s ol M ul t i phy s i c s ) t o s how t he pr oc e s s of ul t r a s ound s e ns i ng . F or c r e a t i on
of pi e z oe l e c t r i c pot e nt i a l , c ha r ge di pol e s w e r e oc c ur r e d i n t he pi e z oe l e c t r i c m a t e r i a l s i n
pol a r i z a t i on pr oc e s s . M e c ha ni c a l de f or m a t i on w a s c a us e d by ul t r a s ound w a ve s i n t he e nt i r e
s t r uc t ur e of t he s a m pl e , w hi c h w i l l l e a d t he e m e r ge nc e of pi e z oe l e c t r i c pot e nt i a l i n bot h s i de s of
t he s put t e r e d A u/ C r e l e c t r ode . T he n, t he e l e c t r ons w oul d f l ow t o t he e x t e r na l s t r uc t ur e of t he
pi e z oe l e c t r i c m a t e r i a l t o ba l a nc e t he pi e z oe l e c t r i c f i e l d a nd c a n a l s o g e ne r a t e vol t a g e a nd c ur r e nt
s i g na l i n t hi s pr oc e s s . T he r e s ul t s of t he s i m ul a t i on a nd di s t r i but i on of ul t r a s ound- i nduc e d
pi e z oe l e c t r i c pot e nt i a l s a r e s how n i n F i g . 6. P e r f or m a nc e of t he pr i nt e d c om pos i t e ( F i g . 6a ) a nd
s ol i d s i ng l e c r y s t a l s t r uc t ur e ( F i g . 6b) w e r e s i m ul a t e d a nd c om pa r e d. A l l t he pa r a m e t e r s w e r e s e t
t o m i m i c t he r e a l c ondi t i on. U l t r a s ound f i e l d a t 1.6M H z w i t h t he s a m e i nt e ns i t y w a s e m pl oy e d t o
bot h s a m pl e s . M or e ove r , t he s i m ul a t e d r e s ul t s w e r e nor m a l i z e d a nd r e pr e s e nt e d by t he c ol or ba r .
T he g e ne r a t e d pi e z oe l e c t r i c pot e nt i a l i n t he hone y c o m b s t r uc t ur e w a s a r ound t w i c e t ha t of t he
s ol i d s t r uc t ur e , w hi c h i m pl i e d t ha t t he c om pos i t e s a m pl e w i t h hone y c om b s t r uc t ur e pe r f or m e d
be t t e r .
1 6
F i g . 6 S i m u l a t e d p i e z o e l e c t r i c p o t e n t i a l d i s t r i b u t i o n i n ( a ) h o n e y c o m b s t r u c t u r e a n d ( b ) s o l i d b r i c k
s t r u c t u r e [ 6 2 ] .
S a m pl e s w i t h S ol i d br i c k s t r uc t ur e , 80% a nd 100% s i z e r a t i o of hone y c om b s t r uc t ur e w e r e
f a br i c a t e d l a y e r by l a y e r a s g r e e n pa r t vi a 3D - pr i nt i ng s y s t e m ( F i g . 7) . S a m pl e ( 100% s i z e r a t i o)
obt a i ne d t he g e om e t r i c s ha pe ( ba s a l a r e a s i z e ) a s 1 c m × 1 c m . T he opt i c a l i m a g e s of pr i nt e d
g r e e n pa r t s a m pl e a r e e x hi bi t e d i n F i g . 7a - c . T he hone y c om b s t r uc t ur e of t he s a m pl e w a s
pe r f e c t l y f or m e d vi a 3D - pr i nt i ng m e t hod. T he de ns e l a y e r s t r uc t ur e s of t he s a m pl e s a r e
c om pa r e d a nd s how n i n F i g . 7d- f unde r s c a l e ba r of 500 μ m . S a m pl e ( 80% s i z e r a t i o) ha d s m a l l
g a ps i n t he l a y e r s a s t he Z - a x i a l f or c ur i ng i s r e s t r i c t e d. D ue t o t he i nt e r na l s t r e s s of t he s t r uc t ur e ,
3D - pr i nt e d br i c k s t r uc t ur e s a m pl e a l s o ha d c r a c ks on t he s ur f a c e a f t e r s i nt e r i ng pr oc e s s . H ow e ve r ,
s a m pl e ( 100% s i z e r a t i o) e x hi bi t e d a be t t e r de ns e l a y e r .
A f t e r s i nt e r i ng pr oc e s s , t he s i z e of t he s a m pl e ( 1 c m × 1c m ) t r a ns f or m e d i nt o a s m a l l e r s i z e ( 0.85
c m × 0.85 c m ) ( F i g 7h) , w hi c h i l l us t r a t e d t ha t t he de ns i t y of t he s a m pl e be c a m e l a r ge r .
C om p a r i ng w i t h pur e B T O c e r a m i c s , t he de ns i t y of t he s a m pl e s ( gr e e n pa r t a nd s i nt e r e d s a m pl e )
1 7
w a s m e a s ur e d vi a A r c hi m e de s ' m e t hod. T he r e s ul t i s r e pr e s e nt e d by T a bl e 3, t he de ns i t y of
t he s a m pl e i nc r e a s e d s ha r pl y a nd w a s c l os e t o de ns i t y of pur e s a m pl e . M or e ove r , F i g . 7g, i a l s o
de m ons t r a t e t he g a ps be t w e e n e a c h l a y e r be c a m e l e s s a f t e r s i nt e r i ng . T hus , t he s t r uc t ur e of t he
s a m pl e be c a m e de ns e r a f t e r s i nt e r i ng , i m pl y i ng t ha t 3D - pr i nt i ng m e t hods ha ve a bi l i t y t o
f a br i c a t e pi e z oe l e c t r i c m a t e r i a l s w i t h e xpe c t e d m a t e r i a l pr ope r t i e s .
T a b l e 3 . D e n s i t y o f s e v e r a l B T O .
D e ns i t y G r e e n P a r t S i nt e r e d S a m pl e P ur e B T O [ 63]
ρ ( g/ c m
3
) 1.21 5.96 6.02
F i g . 7 ( a ) G r e e n - p a r t w i t h b r i c k s t r u c t u r e . ( b ) G r e e n - p a r t w i t h h o n e y c o m b - s t r u c t u r e ( 1 0 0 % s i z e r a t i o ) . ( c )
G r e e n - p a r t w i t h h o n e y c o m b - s t r u c t u r e ( 8 0 % s i z e r a t i o ) . ( d - f ) O p t i c a l m i c r o s c o p y i m a g e s o f l a y e r d e t a i l s
f o r t h e g r e e n - p a r t s . ( g ) T h e l a y e r d e t a i l s o f t h e s a m p l e b e f o r e s i n t e r i n g p r o c e s s . ( h ) C o m p a r i s o n o f t h e
s a m p l e s b e f o r e a n d a f t e r s i n t e r i n g . ( i ) T h e l a y e r d e t a i l s o f t h e s i n t e r e d s a m p l e .
1 8
3.2.2 U l t r as ou n d s e n s i n g of 3D - p r i n g d e vi c e
T he s i nt e r e d s a m pl e ( 100% s i z e r a t i o) w a s t he n ut i l i z e d f or f a br i c a t i ng t he c om pos i t e s a m pl e . I n
F i g . 8a , t he hol e s of t he hone y c om b s t r uc t ur e w e r e f i l l e d w i t h c ur e d e pox y a nd g e om e t r i c a l l y
de s i gne d a s a he x a g on w i t h s i de l e ngt h of 800 μ m a nd w a l l t hi c kne s s of 450 μ m ( F i g. 8b) . A f t e r
c ur i ng pr oc e s s , t he s i nt e r e d c om pos i t e s a m pl e w a s l a ppe d t o 800 μ m , a nd bot h s i de s of t he
s a m pl e w e r e s put t e r e d by A u/ C r e l e c t r ode ( 500 nm ) . A f t e r pol i ng , t he i m pe da nc e a nd pha s e
a ngl e s pe c t r um of t he c om pos i t e w a s de m ons t r a t e d i n F i g. 8c . T he r e s ona nt f r e que nc y ( f r ) a nd
a nt i - r e s ona nt f r e que nc y ( f a ) a r e de t e r m i ne d a s 1.60 M H z a nd 1.66 M H z , s e pa r a t e l y . T o i l l us t r a t e
t he c onve r s i on e f f i c i e nc y be t w e e n e l e c t r i c a l a nd m e c ha ni c a l e ne r gy , t he e l e c t r om e c ha ni c a l
c oupl i ng c oe f f i c i e nt ( k t ) c a n be de f i ne d a s [ 60] :
a p p l i e d e n e r g y E l e c t r i c a l
s t o r e d e n e r g y M e c h a n i c a l
= t k ( 5)
a
r
a
r
2f
π f
c o t
2f
π f
× = t k ( 6)
w he r e k t f or t he 3D - pr i nt e d c om pos i t e i s c a l c ul a t e d t o be 31.1% . W ha t i s m or e , t he pi e z oe l e c t r i c
c ons t a nt ( d 3 3 ) i s a l s o t e s t e d a s 60 pC / N . T hus , t he 3D - pr i nt e d c om pos i t e s a m pl e obt a i ne d t he
pi e z oe l e c t r i c pr ope r t y . T he pol a r i z a t i on- e l e c t r i c f i l e d ( P - E ) hy s t e r e s i s l oop ( F i g. 8d) w a s a l s o
m e a s ur e d f or c ha r a c t e r i z i ng t he f e r r oe l e c t r i c pr ope r t i e s of t he 3D - pr i nt e d c om pos i t e s a m pl e . T he
P - E c ur ve s how i ng a t y p i c a l f e r r oe l e c t r i c hy s t e r e s i s l oop w a s t e s t e d unde r a n e l e c t r i c f i e l d of
30kV / c m .T he r e m na nt pol a r i z a t i on ( P r ) a nd t he m a x i m um pol a r i z a t i on ( P m a x ) c a n be l oc a t e d a s
0.346 μ C / c m
2
a nd 2.29 μ C / c m
2
, r e s pe c t i ve l y . O ve r a l l , t he c oe r c i ve f i e l d ( E c ) w a s 3.645 V / c m ,
w hi c h s how e d t ha t t he 3D - pr i nt i ng m e t hod c oul d f a br i c a t e t he pi e z oe l e c t r i c m a t e r i a l s w i t h
de s i r e d f e r r oe l e c t r i c pr ope r t i e s .
1 9
F i g . 8 ( a ) T h e s i n t e r e d c o m p o s i t e s a m p l e f i l l e d w i t h e p o x y r e s i n . ( b ) T h e d e t a i l s o f t h e h o n e y c o m b -
s t r u c t u r e u n d e r t h e m i c r o s c o p e w i t h a s c a l e b a r o f 5 0 0 μ m . ( c ) I m p e d a n c e a n d p h a s e a n g l e s p e c t r u m o f
t h e s p u t t e r e d c o m p o s i t e s a m p l e . ( d ) P o l a r i z a t i o n - e l e c t r i c f i e l d h y s t e r e s i s l o o p o f t h e c o m p o s i t e s a m p l e .
T o f u r t h e r s t ud y t he m a t e r i a l pe r f or m a n c e of ul t r a s ou nd w a ve s s e n s i ng, a n ul t r a s on i c de vi c e ( F i g .
9a ) w a s a s s e m bl e d by 3D - pr i nt e d c om pos i t e s a m pl e w i t h hone y c om b- s t r uc t ur e . T he c om pos i t e
c onne c t e d w i t h c oppe r w i r e w a s e nc a ps ul a t e d w i t h e c o- f l e x . U l t r a s ound t e s t s y s t e m w a s
c ons t i t ut e d by a n a m pl i f i e r , a n os c i l l os c ope , ul t r a s ound t r a ns duc e r ( ul t r a s ound t r a ns m i t t e r ) a nd a
f unc t i on g e ne r a t or . T he s c he m a t i c di a gr a m of t he 3D - pr i nt e d ul t r a s oni c de vi c e i s de m ons t r a t e d
i n F i g . 9b. U l t r a s ound g e ne r a t e d by a 1M H z ul t r a s ound t r a ns m i t t e r unde r va r i ous i nput vol t a g e s
2 0
di r e c t l y pr opa ga t e s t o t he a r e a of t he c om pos i t e i n de vi c e . T he r e c e i ve d ul t r a s ound c a n be
c onve r t e d t o e l e c t r i c s i g na l a s out put vol t a g e by pi e z oe l e c t r i c e f f e c t .
F i g . 9 ( a ) O p t i c a l i m a g e o f t h e f a b r i c a t e d d e v i c e . ( b ) S c h e m a t i c a n d d e s i g n o f t h e 3 D - p r i n t e d u l t r a s o n i c
d e v i c e .
1 M Ω i nt e r na l i m pe da nc e w a s s e t by t he os c i l l os c ope , a nd t he s i g na l g e ne r a t or unde r 1M H z
i nput t he vol t a g e s f r om 0 V t o 200 V t hr oug h t he a m pl i f i e r t o m a ke t he 3D - pr i nt e d ul t r a s oni c
de vi c e c r e a t i ng t he out put pow e r ( F i g. 10a - f ) . I n F i g . 10g , by i nc r e a s i ng t he i nput - vol t a g e , t he
a m pl i t ude of t he out put vol t a g e a s c e nds s ha r pl y a t f i r s t , a nd t he n i nc r e a s e g r a dua l l y a f t e r t he
i nput vol t a g e i s ove r 150 V . E ve nt ua l l y , t he a m pl i t ude of t he out put vol t a g e r e a c he s t o m a x i m um
va l ue a s 180 m V pp w i t hout m or e a m pl i f i c a t i on. R e l e va nt l y , t he vol t a g e e f f i c i e nc y a nd out put
pow e r a r e c a l c ul a t e d t o be a bout 0.1% a nd 9 nW , r e s pe c t i ve l y . T he e s s e nt i a l pa r a m e t e r s of t he
ul t r a s oni c de vi c e a r e s um m a r i z e d i n T a bl e 4. T he out put pow e r i s not hi g h, none t he l e s s , i t c a n be
a ppl i e d i n l ow - pow e r de vi c e f or f ur t he r a ppl i c a t i on. O ve r a l l , i t i l l us t r a t e s t ha t ul t r a s oni c de vi c e
w i t h 3D - pr i nt e d hone y c om b- s t r uc t ur e c om pos i t e i s a bl e t o s e ns e a nd c onve r t ul t r a s ound t o
i nduc e e l e c t r i c s i g na l , w hi c h i m pl i e s t ha t 3D - pr i nt i ng t e c hnol ogy ha s t he pot e nt i a l t o f a br i c a t e
2 1
va r i ous pi e z oe l e c t r i c de vi c e w i t h e x pe c t e d pe r f or m a nc e s .
T a b l e 4 . P e r f o r m a n c e p a r a m e t e r s o f t h e u l t r a s o n i c d e v i c e .
P a r a m e t e r s U l t r a s oni c de vi c e w i t h hone y c om b s t r uc t ur e
P i e z oe l e c t r i c c ons t a nt ( d 3 3 ) 60 pC / N
C oe r c i ve f i e l d ( E c ) 3.645 kV / c m
M a xi m um pol a r i z a t i on ( P m a x ) 2.29 μ C / c m
2
T hi c kne s s ( t ) 800 μ m
D e ns i t y ( ρ ) 5.96 g / c m
3
R e s ona nt f r e que nc y ( f a ) 1.6 M H z
O ut put vol t a g e ( V ) 180 m V pp
O ut put pow e r ( P) 9 nW
F i g . 1 0 O u t p u t v o l t a g e a m p l i t u d e s o f t h e d e v i c e o v e r t i m e f o r d i f f e r e n t i n p u t v o l t a g e s o f ( a ) 0 V , ( b ) 2 5 V ,
( c ) 5 0 V , ( d ) 1 0 0 V , ( e ) 1 5 0 V , a n d ( f ) 2 0 0 v . ( g ) T e n d e n c y o f t h e o u t p u t v o l t a g e .
2 2
C h a p t e r 4 . C o n c l u s i o n s
I n c onc l us i on, a K N N l e a d- f r e e ul t r a s ound ne e dl e - t r a ns duc e r w a s f a br i c a t e d, a nd a n ul t r a s oni c
de vi c e a s s e m bl e d by 3D - pr i nt e d pi e z oe l e c t r i c c om pos i t e f or ul t r a s ound s e ns i ng w a s a l s o
a c hi e ve d.
4.1 E f f e c t of u l t r as ou n d t r an s d u c e r f ab r i c at i on
I n t hi s t he s i s , t he s i m ul a t i on, de s i gn a nd f a br i c a t i on m e t hod of t he K N N l e a d- f r e e t r a ns duc e r
w e r e i nt r oduc e d. M or e ove r , t he ul t r a s oni c i m a g i ng pe r f or m a nc e s of t he f a br i c a t e d t r a ns duc e r
w e r e a l s o e va l ua t e d, w hi c h i ns pi r e d t he f ur t he r s t udy of ut i l i z i ng l e a d- f r e e pi e z oe l e c t r i c m a t e r i a l
t o f a br i c a t e hi g h- f r e que nc y ul t r a s ound t r a ns duc e r f or r e l e va nt i m a g i ng a ppl i c a t i on.
4.2 E f f e c t of 3D - p r i n t i n g m e t h od f or u l t r as on i c d e vi c e
I n t he s t udy , a pi e z oe l e c t r i c c om pos i t e w i t h c om pl e x hone y c om b s t r uc t ur e w a s de s i g ne d,
s i m ul a t e d a nd f a br i c a t e d by 3D - pr i nt i ng t e c hnol ogy ( M I P - S L m e t hod) . E xpe c t e d pi e z oe l e c t r i c
a nd f e r r oe l e c t r i c pr ope r t i e s w e r e g a i ne d. B e s i de s , a n ul t r a s oni c de vi c e w a s i nt e g r a t e d by 3D -
pr i nt e d c om pos i t e i n or de r t o t e s t t he m a t e r i a l pe r f or m a nc e of ul t r a s ound s e ns i ng . T he r e s ul t s
i ndi c a t e d t ha t 3D - pr i nt i ng m e t hod i s c a pa bl e t o e nha nc e t he e f f i c i e nc y of f a br i c a t i on pr oc e s s . I n
f ut ur e , t he be ne f i t s of us i ng 3D - pr i nt i ng m e t hod t o f a br i c a t e de vi c e s w i l l be f ur t he r i nve s t i g a t e d
f or m or e bi om e di c a l a ppl i c a t i ons .
R e f e r e n c e s :
[ 1 ] B . A . D a r m a w a n e t a l . , " S e l f - f o l d e d m i c r o r o b o t f o r a c t i v e d r u g d e l i v e r y a n d r a p i d u l t r a s o u n d -
t r i g g e r e d d r u g r e l e a s e , " S e n s o r s A c t u a t o r s B : C h e m i c a l , v o l . 3 2 4 , p . 1 2 8 7 5 2 , 2 0 2 0 .
[ 2 ] R . M a n w a r , K . K r a t k i e w i c z , a n d K . A v a n a k i , " O v e r v i e w o f u l t r a s o u n d d e t e c t i o n t e c h n o l o g i e s f o r
p h o t o a c o u s t i c i m a g i n g , " M i c r o m a c h i n e s , v o l . 1 1 , n o . 7 , p . 6 9 2 , 2 0 2 0 .
[ 3 ] S . A . N y r n e s , S . F a d n e s , M . S . W i g e n , L . M e r t e n s , a n d L . L o v s t a k k e n , " B l o o d s p e c k l e - t r a c k i n g b a s e d
o n h i g h – f r a m e r a t e u l t r a s o u n d i m a g i n g i n p e d i a t r i c c a r d i o l o g y , " J o u r n a l o f t h e A m e r i c a n S o c i e t y o f
E c h o c a r d i o g r a p h y , v o l . 3 3 , n o . 4 , p p . 4 9 3 - 5 0 3 . e 5 , 2 0 2 0 .
2 3
[ 4 ] J . W a n g e t a l . , " F a b r i c a t i o n a n d h i g h a c o u s t i c p e r f o r m a n c e o f h i g h f r e q u e n c y n e e d l e u l t r a s o u n d
t r a n s d u c e r w i t h P M N - P T / E p o x y 1 - 3 p i e z o e l e c t r i c c o m p o s i t e p r e p a r e d b y d i c e a n d f i l l m e t h o d , "
S e n s o r s A c t u a t o r s A : P h y s i c a l , v o l . 3 1 8 , p . 1 1 2 5 2 8 , 2 0 2 1 .
[ 5 ] C . P . G r a c i t e l l i , V . M . G e r e n t e , R . L . F u r l a n e t t o , E . A m a r o J r , a n d A . P a r a n h o s J r , " M a g n e t i c
R e s o n a n c e I m a g i n g f o r G l a u c o m a E v a l u a t i o n , " J o u r n a l o f G l a u c o m a , v o l . 2 9 , n o . 8 , p p . 6 2 2 - 6 2 6 , 2 0 2 0 .
[ 6 ] S . B . H a n , Y . - C . L i u , K . M o h a m e d - N o r i e g a , L . T o n g , a n d J . S . M e h t a , " O b j e c t i v e I m a g i n g
D i a g n o s t i c s f o r D r y E y e D i s e a s e , " J o u r n a l o f O p h t h a l m o l o g y , v o l . 2 0 2 0 , 2 0 2 0 .
[ 7 ] R . C h e n e t a l . , " E c o - F r i e n d l y H i g h l y S e n s i t i v e T r a n s d u c e r s B a s e d o n a N e w K N N – N T K – F M L e a d -
F r e e P i e z o e l e c t r i c C e r a m i c f o r H i g h - F r e q u e n c y B i o m e d i c a l U l t r a s o n i c I m a g i n g A p p l i c a t i o n s , " I E E E
T r a n s a c t i o n s o n B i o m e d i c a l E n g i n e e r i n g , v o l . 6 6 , n o . 6 , p p . 1 5 8 0 - 1 5 8 7 , 2 0 1 8 .
[ 8 ] L . J i a n g e t a l . , " F a b r i c a t i o n o f a ( K , N a ) N b O 3 - b a s e d l e a d - f r e e 1 - 3 p i e z o c o m p o s i t e f o r h i g h -
s e n s i t i v i t y u l t r a s o n i c t r a n s d u c e r s a p p l i c a t i o n , " J o u r n a l o f A p p l i e d P h y s i c s , v o l . 1 2 5 , n o . 2 1 , p . 2 1 4 5 0 1 ,
2 0 1 9 .
[ 9 ] A . D a n g i , S . A g r a w a l , J . L i e b e r k n e c h t , J . Z h a n g , a n d S . - R . K o t h a p a l l i , " R i n g u l t r a s o u n d t r a n s d u c e r
b a s e d m i n i a t u r i z e d p h o t o a c o u s t i c i m a g i n g s y s t e m , " i n 2 0 1 8 I E E E S E N S O R S , 2 0 1 8 , p p . 1 - 4 : I E E E .
[ 1 0 ] P . S u n e t a l . , " D e s i g n a n d f a b r i c a t i o n o f P I N - P M N - P T s i n g l e - c r y s t a l h i g h - f r e q u e n c y u l t r a s o u n d
t r a n s d u c e r s , " I E E E t r a n s a c t i o n s o n u l t r a s o n i c s , f e r r o e l e c t r i c s , f r e q u e n c y c o n t r o l , v o l . 5 6 , n o . 1 2 , p p . 2 7 6 0 - 2 7 6 3 ,
2 0 0 9 .
[ 1 1 ] Y . C h e n e t a l . , " P Z T c e r a m i c s f a b r i c a t e d b a s e d o n s t e r e o l i t h o g r a p h y f o r a n u l t r a s o u n d t r a n s d u c e r
a r r a y a p p l i c a t i o n , " C e r a m i c s I n t e r n a t i o n a l , v o l . 4 4 , n o . 1 8 , p p . 2 2 7 2 5 - 2 2 7 3 0 , 2 0 1 8 .
[ 1 2 ] Z . Z h a n g e t a l . , " D e s i g n a n d c o m p a r i s o n o f P M N - P T s i n g l e c r y s t a l s a n d P Z T c e r a m i c s b a s e d m e d i c a l
p h a s e d a r r a y u l t r a s o n i c t r a n s d u c e r , " S e n s o r s A c t u a t o r s A : P h y s i c a l , v o l . 2 8 3 , p p . 2 7 3 - 2 8 1 , 2 0 1 8 .
[ 1 3 ] C . - M . W o n g , Y . C h e n , H . L u o , J . D a i , K . - H . L a m , a n d H . L . - w . C h a n , " D e v e l o p m e n t o f a 2 0 - M H z
w i d e - b a n d w i d t h P M N - P T s i n g l e c r y s t a l p h a s e d - a r r a y u l t r a s o u n d t r a n s d u c e r , " U l t r a s o n i c s , v o l . 7 3 , p p .
1 8 1 - 1 8 6 , 2 0 1 7 .
[ 1 4 ] H . W u , Y . Z h a n g , J . W u , J . W a n g , a n d S . J . P e n n y c o o k , " M i c r o s t r u c t u r a l o r i g i n s o f h i g h p i e z o e l e c t r i c
p e r f o r m a n c e : a p a t h w a y t o p r a c t i c a l l e a d‐ f r e e m a t e r i a l s , " A d v a n c e d F u n c t i o n a l M a t e r i a l s , v o l . 2 9 , n o .
3 3 , p . 1 9 0 2 9 1 1 , 2 0 1 9 .
[ 1 5 ] A . J a i n , Y . W a n g , a n d H . G u o , " S i g n i f i c a n t e n h a n c e m e n t i n m i c r o s t r u c t u r a l a n d e l e c t r i c a l p r o p e r t i e s
o f l e a d - f r e e ( 1 - x ) B a 0 . 9 S r 0 . 1 T i 0 . 9 Z r 0 . 1 O 3 - x L i N b O 3 c e r a m i c c o m p o s i t e s , " J o u r n a l o f A l l o y s a n d
C o m p o u n d s , v o l . 8 5 7 , p . 1 5 8 2 4 4 , 2 0 2 1 .
[ 1 6 ] S . A b e l e t a l . , " A s t r o n g e l e c t r o - o p t i c a l l y a c t i v e l e a d - f r e e f e r r o e l e c t r i c i n t e g r a t e d o n s i l i c o n , " N a t u r e
c o m m u n i c a t i o n s , v o l . 4 , n o . 1 , p p . 1 - 6 , 2 0 1 3 .
[ 1 7 ] S . T . L a u , H . F . J i , X . L i , W . R e n , Q . Z h o u , a n d K . K . S h u n g , " K N N / B N T c o m p o s i t e l e a d - f r e e f i l m s
f o r h i g h - f r e q u e n c y u l t r a s o n i c t r a n s d u c e r a p p l i c a t i o n s , " I E E E t r a n s a c t i o n s o n u l t r a s o n i c s , f e r r o e l e c t r i c s ,
f r e q u e n c y c o n t r o l , v o l . 5 8 , n o . 1 , p p . 2 4 9 - 2 5 4 , 2 0 1 1 .
[ 1 8 ] A . J a i n , P . K J , A . K . S h a r m a , A . J a i n , a n d R . P N , " D i e l e c t r i c a n d p i e z o e l e c t r i c p r o p e r t i e s o f
P V D F / P Z T c o m p o s i t e s : A r e v i e w , " P o l y m e r E n g i n e e r i n g & S c i e n c e , v o l . 5 5 , n o . 7 , p p . 1 5 8 9 - 1 6 1 6 , 2 0 1 5 .
[ 1 9 ] K . S . R a m a d a n , D . S a m e o t o , a n d S . E v o y , " A r e v i e w o f p i e z o e l e c t r i c p o l y m e r s a s f u n c t i o n a l m a t e r i a l s
f o r e l e c t r o m e c h a n i c a l t r a n s d u c e r s , " S m a r t M a t e r i a l s a n d S t r u c t u r e s , v o l . 2 3 , n o . 3 , p . 0 3 3 0 0 1 , 2 0 1 4 .
[ 2 0 ] H . J a n t u n e n , T . H u , A . U u s i m ä k i , a n d S . L e p p ä v u o r i , " T a p e c a s t i n g o f f e r r o e l e c t r i c , d i e l e c t r i c ,
p i e z o e l e c t r i c a n d f e r r o m a g n e t i c m a t e r i a l s , " J o u r n a l o f t h e E u r o p e a n C e r a m i c S o c i e t y , v o l . 2 4 , n o . 6 , p p .
1 0 7 7 - 1 0 8 1 , 2 0 0 4 .
[ 2 1 ] M . S . M i r z a , Q . L i u , T . Y a s i n , X . Q i , J . - F . L i , a n d M . I k r a m , " D i c e - a n d - f i l l p r o c e s s i n g a n d
c h a r a c t e r i z a t i o n o f m i c r o s c a l e a n d h i g h - a s p e c t - r a t i o ( K , N a ) N b O 3 - b a s e d 1 – 3 l e a d - f r e e p i e z o e l e c t r i c
c o m p o s i t e s , " C e r a m i c s I n t e r n a t i o n a l , v o l . 4 2 , n o . 9 , p p . 1 0 7 4 5 - 1 0 7 5 0 , 2 0 1 6 .
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2 4
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2 0 1 9 .
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2 0 1 6 .
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p r e d n i s o l o n e t a b l e t s v i a f u s e d d e p o s i t i o n m o d e l l i n g ( F D M ) 3 D p r i n t i n g , " E u r o p e a n J o u r n a l o f
P h a r m a c e u t i c a l S c i e n c e s , v o l . 6 8 , p p . 1 1 - 1 7 , 2 0 1 5 .
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p r o t o t y p i n g , v o l . 1 2 , n o . 1 , p p . 9 5 - 1 0 3 , 2 0 1 7 .
2 5
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c o m p l e x a r c h i t e c t u r e s v i a s t e r e o l i t h o g r a p h y , " A C S a p p l i e d m a t e r i a l s & i n t e r f a c e s , v o l . 9 , n o . 3 9 , p p .
3 4 3 1 4 - 3 4 3 2 4 , 2 0 1 7 .
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s t e r e o l i t h o g r a p h y , " M a c r o m o l e c u l a r M a t e r i a l s a n d E n g i n e e r i n g , v o l . 3 0 2 , n o . 9 , p . 1 6 0 0 5 5 3 , 2 0 1 7 .
[ 4 6 ] L . J i a n g e t a l . , " H i g h p i e z o e l e c t r i c i t y i n ( K , N a ) ( N b , S b ) O 3 – ( B i , L a , N a , L i ) Z r O 3 l e a d - f r e e
c e r a m i c s , " J o u r n a l o f m a t e r i a l s s c i e n c e , v o l . 5 1 , n o . 1 0 , p p . 4 9 6 3 - 4 9 7 2 , 2 0 1 6 .
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m a c r o s c o p i c p r o p e r t i e s o f m o d i f i e d ( K , N a ) N b O 3 - b a s e d l e a d - f r e e p i e z o c e r a m i c s , " J o u r n a l o f t h e
E u r o p e a n C e r a m i c S o c i e t y , v o l . 3 8 , n o . 5 , p p . 2 3 3 5 - 2 3 4 3 , 2 0 1 8 .
[ 4 8 ] Z . C h e n e t a l . , " T h r e e - d i m e n s i o n a l p r i n t e d p i e z o e l e c t r i c a r r a y f o r i m p r o v i n g a c o u s t i c f i e l d a n d s p a t i a l
r e s o l u t i o n i n m e d i c a l u l t r a s o n i c i m a g i n g , " M i c r o m a c h i n e s , v o l . 1 0 , n o . 3 , p . 1 7 0 , 2 0 1 9 .
[ 4 9 ] T . R o s e n t a l a n d S . M a g d a s s i , " A n e w a p p r o a c h t o 3 D p r i n t i n g d e n s e c e r a m i c s b y c e r a m i c p r e c u r s o r
b i n d e r s , " A d v a n c e d E n g i n e e r i n g M a t e r i a l s , v o l . 2 1 , n o . 1 0 , p . 1 9 0 0 6 0 4 , 2 0 1 9 .
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S t i m u l a t i o n A p p l i c a t i o n , " A d v a n c e d F u n c t i o n a l M a t e r i a l s , v o l . 2 9 , n o . 3 3 , p . 1 9 0 2 5 2 2 , 2 0 1 9 .
[ 5 1 ] H . K i m a n d S . L e e , " C h a r a c t e r i z a t i o n o f e l e c t r i c a l h e a t i n g o f g r a p h e n e / P L A h o n e y c o m b s t r u c t u r e
c o m p o s i t e m a n u f a c t u r e d b y C F D M 3 D p r i n t e r , " F a s h i o n T e x t i l e s , v o l . 7 , n o . 1 , p p . 1 - 1 8 , 2 0 2 0 .
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v o l . 2 8 , n o . 1 1 , p p . 4 6 3 5 - 4 6 4 0 , 2 0 1 4 .
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n e e d l e t r a n s d u c e r , " U l t r a s o u n d i n m e d i c i n e & b i o l o g y , v o l . 3 3 , n o . 1 2 , p p . 1 9 7 1 - 1 9 7 7 , 2 0 0 7 .
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t r a n s d u c e r f o r u l t r a s o n i c i m a g i n g a n d t r a p p i n g , " A p p l i e d p h y s i c s l e t t e r s , v o l . 1 0 1 , n o . 2 , p . 0 2 4 1 0 5 , 2 0 1 2 .
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t r a n s d u c e r s f o r b i o m e d i c a l a p p l i c a t i o n s , " P r o g r e s s i n m a t e r i a l s s c i e n c e , v o l . 6 6 , p p . 8 7 - 1 1 1 , 2 0 1 4 .
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I E E E t r a n s a c t i o n s o n u l t r a s o n i c s , f e r r o e l e c t r i c s , a n d f r e q u e n c y c o n t r o l , v o l . 5 0 , n o . 1 1 , p p . 1 5 4 8 - 1 5 5 7 , 2 0 0 3 .
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u s i n g p r o j e c t i o n - b a s e d s t e r e o l i t h o g r a p h y o f b a r i u m t i t a n a t e c e r a m i c s u s p e n s i o n s , " R a p i d P r o t o t y p i n g
J o u r n a l , 2 0 1 7 .
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D e v i c e s , " M i c r o m a c h i n e s , v o l . 1 1 , n o . 8 , p . 7 1 3 , 2 0 2 0 .
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p i e z o e l e c t r i c p e r o v s k i t e m a t e r i a l f o r m u l t i l a y e r a c t u a t o r s , " B u l l e t i n o f M a t e r i a l s S c i e n c e , v o l . 4 0 , n o . 4 , p p .
7 5 9 - 7 7 1 , 2 0 1 7 .

Abstract (if available)

Abstract As a non-invasive diagnostic method, high-frequency ultrasonic imaging is widely utilized in biomedical imaging. The core part of the ultrasonic device is piezoelectric material. The main piezoelectric materials applied in fabrication of ultrasonic devices are lead-based ceramics, represented by lead zirconate titanate (PZT), which bring potentially toxic and harmful problem to human body. Therefore, it is vital to develop new eco-friendly lead-free medical devices as lead-based alternatives. Additionally, for conventional fabrication methods, the piezoelectric materials are mostly produced by mold-forming, mixing or dicing-filing method. Nevertheless, these techniques are restricted in fabricating complex shapes or structures. Herein, in this work, we focused on fabrication of lead-free ultrasound transducer for ultrasonic imaging application and utilizing 3D-printing method to fabricate piezoelectric composites for ultrasonic device. Firstly, for the fabrication of ultrasound transducers, a potassium sodium niobate (KNN) lead-free piezoelectric material was employed. Needle transducers with aperture size of 0.6 mm × 0.6 mm were designed, fabricated and studied for imaging application. The transducer with a high center frequency (33 MHz), high pulse-echo signal (0.8 Vpp), broad bandwidth (89%, -6 dB), and expected insertion loss (20.9 dB) was achieved. Furthermore, a tungsten wire-phantom and a porcine eyeball were used for testing the imaging performance of the fabricated ultrasound transducers. Secondly, for 3D-printing of ultrasonic device, the Mask-Image-Projection-based Stereolithography (MIP-SL) process, one of 3D-printing methods, was applied to fabricate the BaTiO3-based piezoelectric composite with honeycomb structure. The 3D-printed piezoelectric composite exhibited a denser density (5.96 g/cm³), prospective piezoelectric constant (60 pC/N) and ferroelectric properties. After being assembled into an ultrasonic device, the 3D-printed piezoelectric sample also showed a prominent output power for ultrasound sensing (180 mVpp). Our studies suggest that KNN-based lead-free piezoelectric material can fabricate ultrasound transducer with attractive properties, which brings more possibilities in using lead-free piezoelectric materials to develop high-frequency and sensitivity ultrasound transducer for biomedical imaging application. What’s more, the results also show effectiveness of utilizing 3D-printing technology in fabricating piezoelectric composite with complex structure for assembling ultrasonic device, implying that 3D-printing method has great potential in producing various piezoelectric materials for the fabrication of ultrasonic devices.

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Development of novel 1-3 piezocomposites for low-crosstalk high frequency ultrasound array transducers

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Asset Metadata

Creator Zeng, Yushun (author)

Core Title Fabrication of ultrasound transducer and 3D-prinitng ultrasonic device

School Viterbi School of Engineering

Degree Master of Science

Degree Program Biomedical Engineering

Publication Date 03/18/2021

Defense Date 03/18/2021

Publisher University of Southern California (original), University of Southern California. Libraries (digital)

Tag 3D-printing,OAI-PMH Harvest,ultrasonic device,ultrasound transducer

Language English

Contributor Electronically uploaded by the author (provenance)

Advisor Zhou, Qifa (committee chair), Chen, Yong (committee member), Yamashiro, Stanley M. (committee member)

Creator Email ysseanzeng@gmail.com,yushunze@usc.edu

Permanent Link (DOI) https://doi.org/10.25549/usctheses-c89-428153

Unique identifier UC11668647

Identifier etd-ZengYushun-9334.pdf (filename),usctheses-c89-428153 (legacy record id)

Legacy Identifier etd-ZengYushun-9334.pdf

Dmrecord 428153

Document Type Thesis

Rights Zeng, Yushun

Type texts

Source University of Southern California (contributing entity), University of Southern California Dissertations and Theses (collection)

Access Conditions The author retains rights to his/her dissertation, thesis or other graduate work according to U.S. copyright law. Electronic access is being provided by the USC Libraries in agreement with the a...

Repository Name University of Southern California Digital Library

Repository Location USC Digital Library, University of Southern California, University Park Campus MC 2810, 3434 South Grand Avenue, 2nd Floor, Los Angeles, California 90089-2810, USA