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MASS SENSING WITH FILM BULK ACOUSTIC RESONATOR
by
Anderson Lin
A Dissertation Presented to the
FACULTY OF THE USC GRADUATE SCHOOL
UNIVERSITY OF SOUTHERN CALIFORNIA
In Partial Fulfillment of the
Requirements for the Degree
DOCTOR OF PHILOSOPHY
(ELECTRICAL ENGINEERING)
May 2012
Copyright 2012 Anderson Lin
Object Description
| Title | Mass sensing with film bulk acoustic resonator |
| Author | Lin, Anderson |
| Author email | andersol@usc.edu;alin1824@hotmail.com |
| Degree | Doctor of Philosophy |
| Document type | Dissertation |
| Degree program | Electrical Engineering |
| School | Viterbi School of Engineering |
| Date defended/completed | 2011-11-30 |
| Date submitted | 2012-01-03 |
| Date approved | 2012-01-06 |
| Restricted until | 2012-01-06 |
| Date published | 2012-01-06 |
| Advisor (committee chair) | Kim, Eun Sok |
| Advisor (committee member) |
Choma, John, Jr. Hsiai, Tzung K. |
| Abstract | This thesis addresses the applications of radio frequency (RF) microelectromechanical systems (MEMS) in the area of film bulk acoustic resonator (FBAR) and its uses as a mass sensor in biological and chemical applications. An abridged review of FBAR, its underlying physics, and its sensing mechanism are first introduced. ❧ In regards to FBAR itself, we introduced the MBVD model, with or without mass loading, and the Mason model for analyzing an FBAR, as well as the considerations that needs to be taken in designing such a device. The fabrication process of the diaphragm supported FBAR that can be used for mass sensing applications is then presented. The measurement setup, with a network analyzer and a LabVIEW program, used to characterize these FBARs is described, and the discussion on spurious mode suppression is also presented. ❧ The first application of FBAR for mass sensing is explosive trace detection with antibody coating. Antibodies were immobilized on the backside of FBAR mass sensors using an antibody immobilization protocol. When the specific explosive is exposed to the sensor, it binds to the antibody on the sensor, causing a shift in the resonant frequency of the FBAR sensor. We demonstrate here selective detection of vapor traces of TNT (Trinitrotoluene, a common explosive) and RDX (Cyclotrimethylenetrinitramine which has one of the lowest vapor pressures among various explosives) without any pre-concentrator. Experimental results on the long-term reliability issue of the FBAR sensors are also presented. ❧ Another application presented here is real-time detection of DNA polymerase reaction with FBAR coated with self-assembled DNA sequences. This label-free, real-time detection of DNA synthesis can potentially lead to detection of single nucleotide addition for DNA sequencing application, which can be developed into a low-cost, third-generation DNA sequencing system. Though in our preliminary study, we observed only the difference before and after the completion of all the DNA bases, it is conceivable to observe addition of a single DNA base with improved FBAR sensors. To achieve this ultimate goal, issues relevant to mass detection in liquid environment, including optimization of FBAR and noise reduction in experimental data acquisition, are addressed here. ❧ The last application presented here is real-time, label-free detection of PSA through mass sensing with FBAR coated with an oriented antibody layer. The first prototype sensor is capable of detecting PSA concentration in hundreds of ng/ml range, and can be regenerated. Also, preliminary testing shows the absence of cross-reaction with bovine serum albumin (BSA). An improved version of the sensor utilizing DTSSP (3,3´-Dithiobis[sulfosuccinimidylpropionate]) crosslinker shows a better response, and increases the sensitivity to a level where PSA detection down to ng/ml range is possible. Other relevant works in connection with the PSA sensing project is also presented to wrap up the thesis. |
| Keyword | FBAR; mass sensing |
| Language | English |
| Part of collection | University of Southern California dissertations and theses |
| Publisher (of the original version) | University of Southern California |
| Place of publication (of the original version) | Los Angeles, California |
| Publisher (of the digital version) | University of Southern California. Libraries |
| Provenance | Electronically uploaded by the author |
| Type | texts |
| Legacy record ID | usctheses-m |
| Contributing entity | University of Southern California |
| Rights | Lin, Anderson |
| Physical access | The author retains rights to his/her dissertation, thesis or other graduate work according to U.S. copyright law. Electronic access is being provided by the USC Libraries in agreement with the author, as the original true and official version of the work, but does not grant the reader permission to use the work if the desired use is covered by copyright. It is the author, as rights holder, who must provide use permission if such use is covered by copyright. The original signature page accompanying the original submission of the work to the USC Libraries is retained by the USC Libraries and a copy of it may be obtained by authorized requesters contacting the repository e-mail address given. |
| Repository name | University of Southern California Digital Library |
| Repository address | USC Digital Library, University of Southern California, University Park Campus MC 7002, 106 University Village, Los Angeles, California 90089-7002, USA |
| Repository email | cisadmin@lib.usc.edu |
| Archival file | uscthesesreloadpub_Volume6/etd-LinAnderso-464.pdf |
Description
| Title | Page 1 |
| Contributing entity | University of Southern California |
| Repository email | cisadmin@lib.usc.edu |
| Full text | MASS SENSING WITH FILM BULK ACOUSTIC RESONATOR by Anderson Lin A Dissertation Presented to the FACULTY OF THE USC GRADUATE SCHOOL UNIVERSITY OF SOUTHERN CALIFORNIA In Partial Fulfillment of the Requirements for the Degree DOCTOR OF PHILOSOPHY (ELECTRICAL ENGINEERING) May 2012 Copyright 2012 Anderson Lin |
