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TUNABLE MICRODISK AND MICRORING RESONATORS
IN COMPOUND SEMICONDUCTORS AND SILICON
by
Lawrence Simpson Stewart
A Dissertation Presented to the
FACULTY OF THE USC GRADUATE SCHOOL
UNIVERSITY OF SOUTHERN CALIFORNIA
In Partial Fulfillment of the
Requirements for the Degree
DOCTOR OF PHILOSOPHY
(ELECTRICAL ENGINEERING)
August 2011
Copyright 2011 Lawrence Simpson Stewart
Object Description
| Title | Tunable microdisk and microring resonators in compound semiconductors and silicon |
| Author | Stewart, Lawrence Simpson |
| Author email | lsstewar@usc.edu;lstewart@gmail.com |
| Degree | Doctor of Philosophy |
| Document type | Dissertation |
| Degree program | Electrical Engineering |
| School | Viterbi School of Engineering |
| Date defended/completed | 2011-06-26 |
| Date submitted | 2011-08-02 |
| Date approved | 2011-08-03 |
| Restricted until | 2011-08-03 |
| Date published | 2011-08-03 |
| Advisor (committee chair) | Dapkus, P. Daniel |
| Advisor (committee member) |
Steier, William H. Goo, Edward K. |
| Abstract | Free carrier based modulation mechanisms are investigated for application to compound semiconductor devices, and the limits of free carrier based tuning are examined. A GaAs based analog of silicon-on-insulator technology is proposed to address the issue of substrate leakage loss. Of particular interest are the material development and the lateral wet oxidation process to create vertical current apertures. Very low-loss GaAs on oxide waveguides are demonstrated. Heterogeneous wafer bonding is utilized to create a hybrid GaAs/InP device, with an InGaAsP active region optimized for use as a depletion mode modulator. Microdisk resonators with a Q of over 8000 are demonstrated. ❧ Thermal tuning is proposed as an alternate mechanism for silicon based devices. A unique tunable resonator based mirror, the wavelength selective reflector, is simulated and characterized in detail, and this device could find application as a functional building block in a photonic integrated circuit or as a cavity mirror in a tunable laser. Extensive simulation and modeling of the efficiency of thermal tuning is performed, and a design with thermal tuning efficiency greater than 90% is proposed. Laterally coupled, high index contrast microring devices require very precise lithography, and a one-step dielectric masking process using the e-beam resist XR-1541 is developed. Silicon processing techniques are developed and optimized, and a ring resonator with Q of 96,000 is demonstrated. In order to address issues with traditional thermal tuning approaches, a process to create doped semiconductor heater elements is developed, and these heater elements are used to thermally tune several high-Q resonator devices. |
| Keyword | photonics; resonators; thermal tuning |
| Language | English |
| Part of collection | University of Southern California dissertations and theses |
| Publisher (of the original version) | University of Southern California |
| Place of publication (of the original version) | Los Angeles, California |
| Publisher (of the digital version) | University of Southern California. Libraries |
| Provenance | Electronically uploaded by the author |
| Type | texts |
| Legacy record ID | usctheses-m |
| Rights | Stewart, Lawrence Simpson |
| Access conditions | The author retains rights to his/her dissertation, thesis or other graduate work according to U.S. copyright law. Electronic access is being provided by the USC Libraries in agreement with the author, as the original true and official version of the work, but does not grant the reader permission to use the work if the desired use is covered by copyright. It is the author, as rights holder, who must provide use permission if such use is covered by copyright. The original signature page accompanying the original submission of the work to the USC Libraries is retained by the USC Libraries and a copy of it may be obtained by authorized requesters contacting the repository e-mail address given. |
| Repository name | University of Southern California Digital Library |
| Repository address | USC Digital Library, University of Southern California, University Park Campus MC 7002, 106 University Village, Los Angeles, California 90089-7002, USA |
| Repository email | cisadmin@usc.edu |
| Archival file | uscthesesreloadpub_Volume71/etd-StewartLaw-242.pdf |
Description
| Title | Page 1 |
| Full text | TUNABLE MICRODISK AND MICRORING RESONATORS IN COMPOUND SEMICONDUCTORS AND SILICON by Lawrence Simpson Stewart A Dissertation Presented to the FACULTY OF THE USC GRADUATE SCHOOL UNIVERSITY OF SOUTHERN CALIFORNIA In Partial Fulfillment of the Requirements for the Degree DOCTOR OF PHILOSOPHY (ELECTRICAL ENGINEERING) August 2011 Copyright 2011 Lawrence Simpson Stewart |
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